Reaction chambers and semiconductor processing equipment
A reaction chamber and process technology, used in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as high processing accuracy and cost, increase equipment complexity, etc., achieve simple structure, solve long cleaning and maintenance cycles, Easy to process effect
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[0028] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the reaction chamber and semiconductor processing equipment of the present invention will be further described in detail below with reference to the drawings and specific implementation methods.
[0029] This embodiment provides a reaction chamber, the reaction chamber includes a vacuum-sealed barrel and a Faraday shield embedded in the vacuum-sealed barrel, the Faraday shield is provided with a slit running through the thickness of the Faraday shield, wherein the vacuum-sealed barrel The inner wall of the inner wall is provided with a recess at a region corresponding to the slit, and the recess is used to accommodate process by-products from the slit of the Faraday shield. In the reaction chamber, a recess is formed on the inner wall of the vacuum-sealed barrel to form an accommodating space for by-products deposited on the vacuum-sealed barrel during the p...
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