Standing wave type double vibrator valveless piezoelectric pump and working method thereof

Abstract

The invention discloses a standing wave type double vibrator valveless piezoelectric pump and a working method thereof. The pump comprises two pre-compression top plates, two piezoelectric vibrators,two silicon rubber layers and a base plate, wherein the two silicon rubber layers are separately arranged on two sides of the base plate; the two piezoelectric vibrators are separately arranged outside the silicon rubber layer; the two pre-compression top plates are separately arranged outside the piezoelectric vibrators; and the structure is fixedly by bolts, and certain pre-compression is applied to the piezoelectric vibrators. The silicon rubber layers and the base plate are provided with a plurality of gaps corresponding to each other, and the positions of the gaps correspond to the positions of wave peaks and wave valleys of standing waves of the two piezoelectric vibrators. By exciting piezoelectric ceramic pieces on the two piezoelectric vibrators, the two vibrators separately generate standing waves with pi / 2 phase difference in time, so that the volume change and the gap opening and closing in a specific time sequence are generated between the vibrators and the silicon rubberlayers, and the liquid in a cavity is pressed to realize directional flow.

Description

technical field [0001] The invention relates to the fields of piezoelectric actuators and piezoelectric pumps, in particular to a standing wave type double vibrator valveless piezoelectric pump and a working method thereof. Background technique [0002] In recent years, with the development of MEMS technology, micropump technology has a huge development space, and the piezoelectric pump relying on the inverse piezoelectric effect is one of the most mature and easy-to-implement micropump technologies. In the past, most of the piezoelectric pumps realized the change of the volume of the cavity through the deformation of the piezoelectric element such as the piezoelectric film, and then realized the pumping of the piezoelectric pump. The flow direction of the fluid passed through the one-way valve at the inlet and outlet or the specific flow channel shape of the inlet and outlet. Create a differential pressure to achieve. [0003] However, valved piezoelectric pumps using chec...

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Problems solved by technology

[0003] However, valved piezoelectric pumps using check valves are difficult to miniaturize due to the presence of valves.

On the other hand, conventional valveless piezo pumps that use a specific flow path shape to create a pressure difference have low back pressure and performance is not good enough

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