Cutting equipment and its rotary table

A technology of rotating worktable and rotary table, applied in worktables, manufacturing tools and other directions, can solve the problems of complex structure, difficult maintenance, low panel cutting accuracy, etc., and achieve the effect of solving low positioning accuracy and ensuring horizontal stability.

Active Publication Date: 2021-08-17
深圳市大族半导体装备科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Based on this, it is necessary to provide a cutting device and its rotary table for the problems of low cutting precision, complex structure and difficult maintenance of panels

Method used

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  • Cutting equipment and its rotary table
  • Cutting equipment and its rotary table
  • Cutting equipment and its rotary table

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Embodiment Construction

[0026] In order to facilitate the understanding of the present invention, the cutting device and its rotary table will be described more fully below with reference to the relevant drawings. A preferred embodiment of the cutting device and its rotary table is shown in the accompanying drawings. However, the cutting device and its rotary table can be implemented in many different forms and are not limited to the embodiments described herein. Rather, the purpose of providing these embodiments is to make the disclosure of the cutting device and its rotary table more thorough and comprehensive.

[0027] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "le...

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Abstract

The invention relates to a cutting device and a rotary table thereof. The above-mentioned rotary table includes a base, a rotary table, a drive assembly, a floating assembly, a stage, an induction sheet, and a photoelectric switch; the rotary table is rotatably connected to the base; the drive assembly is arranged on the base, and the power of the drive assembly The output end is connected to the rotating platform; there are multiple floating components, and the multiple floating components are all arranged on the base, and each floating component is located between the rotating platform and the base, and each floating component is used for floating support The rotating platform; the stage is set on the side of the rotating platform away from the base; the induction sheet is arranged on the rotating platform; the photoelectric switch is arranged on the base and corresponds to the induction sheet, and the control terminal of the photoelectric switch and the drive assembly For communication connection, the photoelectric switch is used to sense the sensing sheet and send out sensing signals. The above-mentioned rotary table makes the rotary platen rotate accurately and stably to a predetermined angle, which solves the problem of low positioning accuracy of the positioning mechanism.

Description

technical field [0001] The invention relates to the technical field of panel cutting, in particular to a cutting device and a rotary table thereof. Background technique [0002] With the rapid development of the semiconductor manufacturing industry, panel cutting technology is becoming more and more diversified. Due to the gradual increase in cutting precision requirements for panels in the market, the traditional positioning mechanism for cutting panels has been unable to meet the needs of the market, that is, the precision of the positioning mechanism is low. In addition, the above-mentioned positioning mechanism has a complex structure and is difficult to maintain, which is not conducive to improving the production efficiency of panel cutting. Contents of the invention [0003] Based on this, it is necessary to provide a cutting device and a rotary table thereof for the problems of low panel cutting precision, complex structure and difficult maintenance. [0004] A ro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25H1/10B25H1/08
CPCB25H1/08B25H1/10
Inventor 吴林龙赖林松陈才伟周志伟马国东尹建刚高云峰
Owner 深圳市大族半导体装备科技有限公司
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