Optothermal detector and preparation method thereof

A detector and photothermal technology, applied in the field of detectors, can solve the problems of low absorption rate of incident light and achieve the effects of easy preparation, simple structure and high energy conversion efficiency

Active Publication Date: 2018-11-23
浙江金果知识产权有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to solve the problem of low absorptivity of incident light in the photothermal detectors in the prior art, the present invention provides a photothermal detector and its preparation method. Strengthen the absorption of incident light, and use the combined design of metal balls and graphene film layers to form a strong coupling effect with incident light, thereby strengthening the absorption of incident light by the photothermal detector of the embodiment of the application and improving the capture efficiency of optical signals , so as to achieve the purpose of improving the detection effect, and the structure is simple, the preparation process is simple and convenient, and it is easy to operate

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  • Optothermal detector and preparation method thereof
  • Optothermal detector and preparation method thereof

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Embodiment 1

[0034] Such as figure 1 As shown, it is a schematic structural diagram of a photothermal detector according to the embodiment of the present application. The photothermal detector of this embodiment is composed of a base layer, a dielectric layer 1, a first nanolayer 2 and a second nanolayer 3 connected sequentially from bottom to top , the first nano-layer 2 is composed of pyroelectric blocks 21 and metal balls 22 connected alternately, starting with the pyroelectric blocks 21 and ending with the pyroelectric blocks 21, the pyroelectric blocks 21 on both sides of the first nano-layer 2 A first electrode 41 and a second electrode 42 are respectively provided for connecting to an external circuit.

[0035] Specifically: the second nanometer layer 3 is a graphene film layer, and the metal balls 22 are made of noble metal materials. The dielectric layer 1 is made of silicon dioxide, the graphene film layer is two layers of graphene, the thickness of the pyroelectric block 21 is ...

Embodiment 2

[0044] Such as figure 2 As shown, based on the photothermal detector disclosed in Embodiment 1, the embodiment of the present application discloses a photothermal detector. On the basis of the photothermal detector disclosed in Embodiment 1, the dielectric layer of this embodiment 1. A third nanometer layer 5 is provided on the lower surface, and the third nanometer layer 5 is made of gold material.

[0045] in particular:

[0046] The lower surface of the dielectric layer 1 is further provided with a third nanometer layer 5 made of gold material, and the thickness of the third nanometer layer 5 is 10-200nm. The coupling effect between the gold film and the incident light is used to enhance the absorption of the incident light, so that the light absorption effect of the detector of the embodiment of the present application is better.

[0047] Such as image 3 As shown in (c), it is the photothermal detector of this embodiment after adding the third nanometer layer 5. The...

Embodiment 3

[0049] Based on the photothermal detector disclosed in Example 1, the embodiment of the present application discloses a method for preparing a photothermal detector, including the following steps:

[0050] Step 1. Prepare the substrate: prepare a clean ITO glass as the substrate layer;

[0051] Step 2, evaporating the dielectric layer: using the electron beam evaporation method to vapor-deposit silicon dioxide on the ITO glass prepared in step 1 to form a dielectric layer;

[0052] Step 3, Glue removal: Use a glue removal machine to coat PMMA photoresist on the dielectric layer formed in step 2, the thickness is the set height of the pyroelectric block, and place the substrate on a hot plate to dry after the glue coating is completed ;

[0053] Step 4, exposure: design the first nano-layer pattern with a pattern generator, and expose the shape of the pyroelectric block with an electron beam to obtain the exposed substrate;

[0054] Step 5, development and fixation: put the s...

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Abstract

The invention belongs to the technical field of detectors, and particularly relates to an optothermal detector and a preparation method thereof. The optothermal detector is formed by sequentially connecting a substrate layer, a dielectric layer, a first nanometer layer and a second nanometer layer from bottom to top; and the first nanometer layer is formed by connecting pyroelectric blocks and metal balls at intervals and starts and ends with the pyroelectric blocks, the pyroelectric blocks on the two sides of the first namometer layer are provided with a first electrode and a second electroderespectively to be used for being connected with an external circuit, the second nanometer layer is a graphene film layer, and the metal balls are made of a precious metal material. Absorption to incident light is enhanced by adopting multiple nanometer layers, a strong coupling effect with the incident light is formed by means of the combination design of the metal balls and the graphene film layer, therefore, absorption to the incident light by the optothermal detector is enhanced, the light signal capture efficiency is improved, and then the purpose of improving the detection effect is achieved; and the structure is simple, the preparation process is simple and convenient and easy to operate.

Description

technical field [0001] The invention belongs to the technical field of detectors, and in particular relates to a photothermal detector and a preparation method thereof. Background technique [0002] At present, photodetectors are mainly divided into two types, photon detectors and photothermal detectors. Among them, pyroelectric detectors are a very important type of photothermal detectors, which are widely used in thermal radiation and from visible light to infrared Band laser detection, but the current photothermal conversion efficiency is relatively low, mainly manifested in the relatively low absorption of light, and its photothermal conversion rate must be low. Contents of the invention [0003] In order to solve the problem of low absorptivity of incident light in the photothermal detectors in the prior art, the present invention provides a photothermal detector and its preparation method. Strengthen the absorption of incident light, and use the combined design of m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/142H01L31/09H01L31/18
CPCH01L27/142H01L31/09H01L31/18Y02P70/50
Inventor 刘翡琼
Owner 浙江金果知识产权有限公司
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