Cleaning processing method of surface of large-diameter precise optical element
A technology of precision optics and processing methods, applied in chemical instruments and methods, cleaning methods and utensils, cleaning methods using tools, etc., can solve the problem that the surface of large-diameter optical components is easy to deliquesce, and cannot completely remove component polishing powder and solid substances, etc. problems, to achieve the effect of reducing the possibility of contamination
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Embodiment 1
[0024] Embodiment 1: A method for cleaning the surface of a large-caliber precision optical element, comprising the following steps:
[0025] S1) Pretreatment of polished large-diameter precision optical components: After the large-diameter precision optical components are polished, use a cleaning tool to remove the remaining polishing powder and solid stains on the edge of the large-diameter precision optical components; the cleaning tool can be soft Long fiber cloth or satin cloth;
[0026] S2) Pre-fixation of the large-diameter precision optical element: the large-diameter precision optical element after step S1) is pre-fixed on a square frame, and the edge of the large-diameter precision optical element is embedded in the square frame; the inner frame of the square frame has Fixed groove, the product is embedded in the fixed groove, and will be processed together with the square frame during the whole cleaning process;
[0027] S3) On-line delivery of the large-diameter p...
Embodiment 2
[0033] Embodiment 2: A method for cleaning the surface of a large-diameter precision optical element, comprising the following steps:
[0034] S1) Pretreatment of polished large-diameter precision optical components: After the large-diameter precision optical components are polished, use a cleaning tool to remove the remaining polishing powder and solid stains on the edge of the large-diameter precision optical components; the cleaning tool can be soft Long fiber cloth or satin cloth;
[0035] S2) Pre-fixation of the large-diameter precision optical element: the large-diameter precision optical element after step S1) is pre-fixed on a square frame, and the edge of the large-diameter precision optical element is embedded in the square frame; the inner frame of the square frame has Fixed groove, the product is embedded in the fixed groove, and will be processed together with the square frame during the whole cleaning process;
[0036] S3) On-line delivery of the large-diameter ...
Embodiment 3
[0042] Embodiment 3: A method for cleaning the surface of a large-caliber precision optical element, comprising the following steps:
[0043] S1) Pretreatment of polished large-diameter precision optical components: After the large-diameter precision optical components are polished, use a cleaning tool to remove the remaining polishing powder and solid stains on the edge of the large-diameter precision optical components; the cleaning tool can be soft Long fiber cloth or satin cloth;
[0044] S2) Pre-fixation of the large-diameter precision optical element: the large-diameter precision optical element after step S1) is pre-fixed on a square frame, and the edge of the large-diameter precision optical element is embedded in the square frame; the inner frame of the square frame has Fixed groove, the product is embedded in the fixed groove, and will be processed together with the square frame during the whole cleaning process;
[0045] S3) On-line delivery of the large-diameter p...
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