Spectral confocal measurement system and method for large-scale measurement

A spectral confocal and measurement system technology, applied in the field of optical displacement measurement, can solve the problems of small measurement position range, reduced measurement accuracy, time-consuming and labor-consuming, etc., to increase the position range, the method is convenient to operate, and the measurement accuracy is guaranteed Effect

Active Publication Date: 2018-12-11
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Spectral confocal technology has higher precision than contact measurement, and has a wide range of applications, but because most of the existing light sources use LED light sources, the wavelength range of the outgoing light is small, making the measurement range small
To increase the position range of measurement, there are mainly methods such as changing the structure of the dispersion objective lens and changing the light source at this stage

Method used

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  • Spectral confocal measurement system and method for large-scale measurement
  • Spectral confocal measurement system and method for large-scale measurement
  • Spectral confocal measurement system and method for large-scale measurement

Examples

Experimental program
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Effect test

Example Embodiment

[0028] Example 1

[0029] See figure 1 with figure 2 The spectral confocal measurement system of this embodiment includes a light source component, a spectral confocal measurement component, a signal receiving component and a processor.

[0030] The light source assembly includes a broad spectrum light source 201, a tunable filter 202 and a collimating lens 203. The broad-spectrum light source 201 may be a halogen lamp or a laser-driven broad-spectrum light source. The tunable filter 202 is used to broaden the spectral beam to a narrow-band beam with a specific center wavelength. The collimating lens 203 is used to collimate the light beam emitted by the tunable filter 202.

[0031] The spectral confocal measurement assembly includes a beam splitter 204 and a dispersive objective lens group 205. The beam splitter 204 makes the light beam emitted from the light source assembly propagate along the original path, and reflects the light beam reflected from the surface of the object 2...

Example Embodiment

[0041] Example 2

[0042] See image 3 The structure of the spectral confocal measurement system of this embodiment is the same as that of Embodiment 1, except that the object to be measured 206 in this embodiment is made of a material with good light transmittance, and the beam dispersed by the dispersive objective lens group 205 can pass through. The object to be measured 206 reaches the lower surface of the object to be measured 206.

[0043] In the first measurement, the beam of the broad-spectrum light source is emitted after being dispersed by the dispersive objective lens group 205. The upper and lower surfaces of the object to be measured 206 will simultaneously cause the monochromatic light of a specific wavelength focused on it to be reflected back in the original way. , So that the monochromatic light energy loss of these two wavelengths is small. The light beam reflected by the upper and lower surfaces of the object 206 to be measured is reflected by the beam splitter ...

Example Embodiment

[0045] Example 3

[0046] This embodiment provides a spectroscopic confocal measurement method for wide-range measurement, which has been included in Embodiment 1, and will not be repeated here.

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Abstract

The invention discloses a spectral confocal measurement system and method for large-scale measurement and belongs to the technical field of optical displacement measurement. The system comprises a light source component, a spectral confocal measurement component, a signal receiving component and a processor; wherein the light source component comprises a wide-spectrum light source and a tunable optical filter; the spectral confocal measurement component includes a beam splitter and a dispersion objective lens group; a light beam in a specific wavelength range successively passes through the beam splitter and the dispersion objective lens group to reach the surface of an object to be measured, and a light beam reflected from the surface of the object to be measured is reflected by the beamsplitter to the signal receiving component; the signal receiving component comprises a CCD camera; the processor obtains wavelength information by calculating an image spectrum obtained by the CCD camera, adjusts the tunable optical filter to output narrowband light according to the wavelength information, and obtains the positional information of the corresponding wavelength by virtue of a linearrelationship between wavelengths and axial distances. By the combination of the wide-spectrum light source and the tunable optical filter, the system and method expand the position range measured bythe object to be measured while ensuring measurement accuracy.

Description

technical field [0001] The invention relates to the technical field of optical displacement measurement, in particular to a spectral confocal measurement system and method for large-scale measurement. Background technique [0002] In recent years, with the rapid development of precision manufacturing, the requirements for measurement technology have also been greatly improved. The traditional contact measurement method can not be applied to different environments because it will damage the object to be measured, and can no longer meet the measurement requirements. Non-contact spectral confocal technology is a new high-precision measurement technology that has emerged in recent years. Due to the high precision, fast measurement speed and high real-time performance of spectral confocal measurement technology, which can be applied to different environments, it has rapidly become a current research hotspot and is widely used in thin film thickness measurement, precision positio...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B11/06
CPCG01B11/022G01B11/06
Inventor 郑臻荣张金雷陶骁常胜倩刘思奇孙鹏张文涛
Owner ZHEJIANG UNIV
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