Spectral confocal measurement system and method for large-scale measurement

Abstract

The invention discloses a spectral confocal measurement system and method for large-scale measurement and belongs to the technical field of optical displacement measurement. The system comprises a light source component, a spectral confocal measurement component, a signal receiving component and a processor; wherein the light source component comprises a wide-spectrum light source and a tunable optical filter; the spectral confocal measurement component includes a beam splitter and a dispersion objective lens group; a light beam in a specific wavelength range successively passes through the beam splitter and the dispersion objective lens group to reach the surface of an object to be measured, and a light beam reflected from the surface of the object to be measured is reflected by the beamsplitter to the signal receiving component; the signal receiving component comprises a CCD camera; the processor obtains wavelength information by calculating an image spectrum obtained by the CCD camera, adjusts the tunable optical filter to output narrowband light according to the wavelength information, and obtains the positional information of the corresponding wavelength by virtue of a linearrelationship between wavelengths and axial distances. By the combination of the wide-spectrum light source and the tunable optical filter, the system and method expand the position range measured bythe object to be measured while ensuring measurement accuracy.

Description

technical field [0001] The invention relates to the technical field of optical displacement measurement, in particular to a spectral confocal measurement system and method for large-scale measurement. Background technique [0002] In recent years, with the rapid development of precision manufacturing, the requirements for measurement technology have also been greatly improved. The traditional contact measurement method can not be applied to different environments because it will damage the object to be measured, and can no longer meet the measurement requirements. Non-contact spectral confocal technology is a new high-precision measurement technology that has emerged in recent years. Due to the high precision, fast measurement speed and high real-time performance of spectral confocal measurement technology, which can be applied to different environments, it has rapidly become a current research hotspot and is widely used in thin film thickness measurement, precision positio...

AI Technical Summary

Problems solved by technology

[0004] Spectral confocal technology has higher precision than contact measurement, and has a wide range of applications, but because most of the existing light sources use LED light sources, the wavelength range of the outgoing light is small, making the measurement range small

To increase the position range of measurement, there are mainly methods such as changing the structure of the dispersion objective lens and changing the light source at this stage. However, the redesign of the structure of the dispersion objective lens is time-consuming and labor-intensive, and cannot solve the measurement problem in time. Changing the LED light source to the wavelength range of the emitted light Although larger halogen lamps and other light sources can also meet certain needs, due to the uneven intensity distribution of each wavelength of the emitted light, the measurement accuracy will be significantly reduced

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