Force balanced closed-loop angular velocity sensor
An angular velocity sensor and force balance technology, which is applied in the field of sensors, can solve problems such as low precision, high requirements for light sources and limited range of optical gyroscopes, and achieve the effect of improving detection accuracy
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[0048] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0049] The purpose of the present invention is to provide a force balance closed-loop angular velocity sensor capable of improving measurement accuracy.
[0050] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0051] Such as Figure 1-Figure 3 As shown, a structural ...
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