Method and apparatus for preparing oxide semiconductor layer

Abstract

The invention provides a method and apparatus for preparing annoxide semiconductor layer, belonging to the technical field of display. The method comprises: forming an oxide semiconductor layer on a substrate; When the oxide semiconductor layer includes a plurality of regions having different thicknesses, oxygen ions are applied to the oxide semiconductor layer such that an oxygen content in the plurality of regions of the oxide semiconductor layer is positively correlated with a thickness of the oxide semiconductor layer. The invention solves the problem that the display effect of the displaypanel is poor due to the poor thickness uniformity of the oxide semiconductor layer. The present invention is used for preparing an oxide semiconductor layer.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method and device for preparing an oxide semiconductor layer. Background technique [0002] With the development of science and technology, the application of the display panel is more and more extensive. The display panel includes a substrate and a plurality of pixel units arranged on the substrate. The pixel unit usually includes an oxide semiconductor layer. [0003] In the process of preparing the oxide semiconductor layer, it is necessary to place multiple targets for forming the oxide semiconductor layer facing the substrate, and to pass charged particles to one side of the multiple targets, and to apply The orthogonal electromagnetic field makes the charged particles bombard the target under the action of the orthogonal electromagnetic field, so that part of the material on the target is knocked out and sputtered onto the substrate to obtain an oxide semiconductor layer...

AI Technical Summary

Problems solved by technology

[0005] The present application provides a method and device for preparing an oxide semiconductor layer, which can solve the problem of poor display effect of display panels in the related art. The technical solution is as follows:

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