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An evaporation source device

A technology of evaporation source and switching device, which is applied in the direction of vacuum evaporation plating, metal material coating process, coating, etc., can solve the problems of low equipment production capacity and long production cycle, so as to improve equipment productivity, reduce impact, and shorten production cycle effect

Active Publication Date: 2020-12-08
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides an evaporation source device, which is used to solve the technical problems of long production cycle and low equipment capacity in the prior art

Method used

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  • An evaporation source device
  • An evaporation source device
  • An evaporation source device

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] The evaporation source device provided in this embodiment includes: a timing belt 206 , an evaporation source carrier 204 arranged on the timing belt 206 , and a vacuum chamber with an independent vacuum system arranged on the timing belt 206 . Described vacuum chamber comprises: chamber body 201, is arranged on the vacuum valve 202 on described chamber body 201, breaks the vacuum line 203 and the vacuum line that vacuumizes line 209 constitutes evaporation source device, filler line 208 and is arranged on chamber The door assembly 207 on the side wall of the body 201.

[0030] Specifically, the process of switching the evaporation source device for evaporation is as follows: the vacuum pipeline 209 of the evaporation source device draws out the air in the cavity 201 to form a vacuum environment consistent with the environment of the main chamber; The door body assembly 207 is opened, and the timing belt 206 is started by the control device to drive the evaporation sour...

Embodiment 2

[0035] The evaporation source device provided in this embodiment adopts the vacuum chamber provided in Embodiment 1, and the difference is that the evaporation source switching device used is different.

[0036] The evaporation source switching device provided in this embodiment includes: a first synchronous belt 309 and a second synchronous belt 304 arranged in parallel, and an evaporation source carrier 311 arranged on the synchronous belt, which is arranged on both sides of the synchronous belt The first lifting platform 301 and the second lifting platform 308.

[0037] Specifically, the switching process of the evaporation source provided in this embodiment is: the evacuation pipeline 306 and the vacuum valve 307 work to extract the gas in the cavity 305 to form a vacuum environment consistent with the main chamber; The door body assembly 302 is opened; the first synchronous belt 309 is used to drive the first synchronous belt 309 to transport the evaporation source 310 us...

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Abstract

The invention provides an evaporation source device. The evaporation source device comprises a vacuum chamber and an evaporation source switching device. The vacuum chamber comprises a cavity body, avacuum valve arranged on the side wall of the cavity body and a vacuum pipeline arranged on the side wall of the cavity body. The evaporation source switching device comprises at least two evaporationsource carrying disks, evaporation sources arranged on the evaporation source carrying disks and a transmission mechanism used for conveying the evaporation sources. By designing the evaporation source as a plurality of independent evaporation sources with independent vacuum systems and adopting a method for switching the evaporation sources by a mechanical transmission device, the process flow of opening a cavity to feed, vacuumize and heat the evaporation sources in the prior art is omitted, the continuous production of evaporation is realized, the influence of evaporation filler on production is greatly reduced, the production cycle is further shortened, and the equipment productivity is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an evaporation source device. Background technique [0002] Compared with the existing liquid crystal display technology, OLED display technology has the advantages of wide color gamut, high contrast, energy saving and thinness, and gradually replaces traditional displays in mobile smart devices such as smartphones, tablet computers, and smart watches. When preparing the organic light-emitting layer of the OLED display, it is usually necessary to adopt a vacuum evaporation process, that is, in a vacuum chamber, a high temperature is generated by an evaporation source, the film material is heated and vaporized, and deposited on a glass substrate. [0003] In the traditional evaporation process, because the volume of the evaporation source is limited, after consuming the organic material in the evaporation source, it is necessary to open the cavity of the evaporation equipment, ad...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCC23C14/246
Inventor 黄伟
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD