Cleanliness control system of cleaning room

Abstract

The embodiment of the invention discloses a cleanliness control system of a cleaning room. The cleanness control system aims to automatically control the rotating speed of a fan of a fan filter unit,save the energy and improve the cleanliness stability of the cleaning room. The cleanliness control system of the cleaning room comprises the fan filter unit, a dust particle concentration tester anda control system body, wherein the fan filter unit is arranged in an upper technical interlayer above the cleaning room, the dust particle concentration tester is arranged in the cleaning room and used for testing the dust particle concentration of the working area of the cleaning room, and the control system body is connected with the fan filter unit and the dust particle concentration tester. According to the cleanliness control system of the cleaning room, when the dust particle concentration in the cleaning room is larger than a set value, the fan of the fan filter unit is controlled to increase the rotating speed; and when the dust particle concentration in the cleaning room is smaller than the set value, the fan of the fan filter unit is controlled to reduce the rotating speed.

Description

technical field [0001] The invention relates to the technical field of cleanliness control, in particular to a cleanliness control system for a clean room. Background technique [0002] At present, with the development of science and technology, electronic products have been widely used in production and life. The mainstream products in electronic products include semiconductor chips and display devices. The production process has strict requirements on the concentration of dust particles in the factory, that is, the cleanliness level, so the process is usually produced in a clean room. In order to ensure the cleanliness level in the clean room, the clean room is usually equipped with a clean air conditioning system, which usually includes a fan filter unit (FFU). [0003] In recent years, with the increase in the processing size and production capacity of electronic products, the area of ​​the clean room has also expanded. Taking a 11th generation TFT-LCD display factory w...

AI Technical Summary

Problems solved by technology

In actual operation, after the fan speed of the FFU is set, it is generally not reset for a long time.

The actual measurement results show that the cleanliness level of most clean rooms is far superior to the level required for process production. Obviously, there is a large amount of redundancy in the amount of circulating air, resulting in a large waste of energy

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