Micro-folded cantilever beam stiffness test device and test method

Abstract

The invention provides a micro-folding cantilever beam stiffness testing device and method. The micro-folding cantilever beam stiffness testing device includes a bottom plate, an X manual displacementtable, a Y manual displacement table, an X-direction micro-electric displacement table, a Y-direction micro-electric displacement table, a first mounting seat, a connecting rod, a micro cantilever beam installation clamping rod, an installation seat, an X-direction laser displacement sensor, a Y-direction laser displacement sensor manual adjustment table, a connecting plate, a Y-direction laser displacement sensor, a mounting bracket, a double-balanced girder force measurement displacement sensor, a micro-folding cantilever beam, a camera holder, a CCD camera and a ring light source. The micro-folding cantilever beam stiffness testing device and method realize accurate testing of the stiffness of the micro-folding cantilever beam, artificial complicated adjustment alignment of the micro-folding cantilever beam is not required, and micro weights are not required to be manufactured to load the micro-folding cantilever beam; and the X-direction micro-electric displacement table and the Y-direction micro-electric displacement table are controlled by a main control computer to output precise displacement, so that accurate testing of the stiffness of the micro-folding cantilever beam isachieved. The micro-folding cantilever beam stiffness testing device and method are further applicable to other types of micro-folding cantilever beam tensile test and micro spring stiffness test.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a testing device and a testing method for the stiffness of a microfolded cantilever beam. Background technique [0002] Microfolded cantilever beam is a very important MEMS device, which is an important part of devices such as microsensors, microactuators and microgyroscopes. The micro-cantilever beam can not only transmit energy, but also use its deformation to realize the multi-degree-of-freedom movement of the mechanism. Therefore, the performance of the micro-cantilever beam plays a vital role in whether the micro-device can work according to the design requirements. The micro-cantilever beam The stiffness characteristic test is a very important part of many performance tests, which determines whether the micro-cantilever beam can achieve the expected design. The traditional micro-cantilever test method uses weights to load, obtain the deformation o...

AI Technical Summary

Problems solved by technology

The traditional micro-cantilever test method uses weights to load, obtain the deformation or displacement of the micro-cantilever through related technical means, and then calculate the stiffness of the micro-cantilever. This method needs to process many micro-weights to gradually calibrate the micro-cantilever stiffness, the method is simple, but the test time is very long, the test efficiency is very low, and this method is only suitable for larger cantilever beams, small cantilever beams cannot use this method to test displacement and force

In the micro-cantilever stiffness test method, relevant scholars use strain gauges to analyze the deformation of the cantilever beam, and then obtain the relationship between force and displacement to calculate the stiffness. The centering of the test sample directly affects the accuracy of the test, but for the heterogeneous folded cantilever Generally speaking, this method will cause unstable test accuracy, or even test failure, and there are related restrictions on the test range, making it difficult to meet the high-efficiency, automated, and high-precision stiffness testing of micro-folded cantilever beams.

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