cutting device

Abstract

To provide a cutting device capable of efficiently photographing cutting grooves formed in a workpiece. The cutting device (1) has an imaging unit (30) for photographing the plate-shaped workpiece (W) held by the holding table (10). ) between the bottom (321) of the plate-shaped workpiece and the air layer forming unit (33) of the air layer, the air layer forming unit (33) has: an annular air path (34), which takes the optical axis of the objective lens (310) as the center; air inlet (35), which introduces air to the annular air path (34); guide plate (36), which makes the air swirl in one direction in the annular air path (34) to generate a vortex flow; and The reverse annular conical flow path (37), its diameter shrinks downward from the annular air path (34), when shooting the cutting groove (G), a vortex air flow (101 ) of the high-pressure air layer (100), the cutting water remaining on the upper surface (Wa) of the plate-shaped workpiece and the cutting groove is blown away by the vortex air flow (101), so that the groove width of the cutting groove can be measured more accurately.

Description

technical field [0001] The present invention relates to a cutting device for cutting a workpiece. Background technique [0002] A cutting device that cuts a workpiece includes at least: a holding table that holds the workpiece; a cutting unit that cuts the workpiece held on the holding table; and an imaging camera (microscope) that photographs the workpiece. The processed surface of the object. The imaging camera is housed in the case to prevent the cutting water and machining chips used in the cutting process from adhering. An opening for shooting is formed at the bottom of the casing, and an openable and closable shutter is attached to the opening. When photographing a workpiece, the shutter is opened to open the aperture. Then, when the workpiece is not photographed, the opening is closed by shielding the opening with a shutter, thereby preventing droplets (water droplets) of cutting water used in the cutting process from adhering to the objective lens of the imaging c...

AI Technical Summary

Problems solved by technology

[0008] However, there is a problem that, since the ejection of air has directionality, when there are droplets of cutting water around the direction in which the air is ejected, the droplets are drawn into the ejection direction of the air, although they are directed toward the workpiece. Air is ejected, but fine water droplets also adhere to the upper surface of the workpiece

In the past, the cutting process was temporarily stopped, and the cutting position and the width of the cutting groove (debris on both sides of the cutting groove) were inspected by taking pictures with a video camera. However, when fine water droplets adhered to the upper surface of the workpiece, it was impossible to To accurately measure the groove width of the cutting groove, it is necessary to dry the upper surface of the workpiece

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