[0027] In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art fall within the protection scope of the present invention.
[0028] During the release of the substrate 1, due to the vibration of the machine and the turbulence of residual gas in the chamber, the falling position of the substrate 1 is shifted, which reduces the accuracy of alignment. In view of the above problems, this embodiment provides a package structure including the substrate 1. And the packaging cover plate 2, the substrate 1 is provided with a first limiting member 11, and the packaging cover plate 2 is provided on the packaging cover plate 2 to cooperate with the second limiting member 21 to align the substrate 1 and the packaging The cover plate 2 performs a second limiting member 21 for alignment limiting.
[0029] figure 1 A schematic diagram showing that the base plate 1 and the cover plate 2 are not aligned, figure 2 A schematic diagram showing the partial connection of the first limiting member 11 and the second limiting member 21, image 3 A schematic diagram showing the complete alignment of the base plate 1 and the cover plate 2. With the aid of the first limiting member 11 and the second limiting member 21, the base plate 1 and the cover plate 2 are pressed together to ensure the alignment accuracy.
[0030] There are multiple positions for the first limiting member 11 and the second limiting member 21. In this embodiment, the packaging structure further includes a first position between the substrate 1 and the packaging cover 2. A sealant layer 3, and the first sealant layer 3 is arranged around the substrate 1 and the packaging substrate 1, so that the substrate 1, the packaging cover 2 and the first sealant The layer 3 defines a sealed space, the first limiting member 11 and the second limiting member 21 are both located outside the sealed space, avoiding the first limiting member 11 and the second limiting The setting of the component 21 affects the normal packaging effect of the device to be packaged.
[0031] In this embodiment, the height of the first limiting member 11 in the direction perpendicular to the substrate 1 is less than or equal to the height of the sealed space in the direction perpendicular to the substrate 1;
[0032] The height of the second limiting member 21 in the direction perpendicular to the substrate 1 is less than or equal to the height of the sealed space in the direction perpendicular to the substrate 1.
[0033] Preferably, the height of the first limiting member 11 in the direction perpendicular to the substrate 1 is smaller than the height of the sealed space in the direction perpendicular to the substrate 1;
[0034] The height of the second limiting member 21 in the direction perpendicular to the substrate 1 is smaller than the height of the sealed space in the direction perpendicular to the substrate 1.
[0035] It is avoided that after the substrate 1 and the cover plate 2 are aligned, the first limiting member 11 and/or the second limiting member 21 are pressed and deformed, so that the substrate 1 and the cover plate 2 cannot be aligned. Jointly carry out the problem of limit position.
[0036] In this embodiment, there is a gap between the orthographic projection of the first limiting member 11 on the cover plate 2 and the second limiting member 21.
[0037] The existence of this gap reserves space for alignment errors, and avoids the problem that the first limiting member 11 and the second limiting member 21 cannot cooperate to limit the position.
[0038] And the existence of the gap can provide space for the installation of lubricant.
[0039] In this embodiment, the gap is controlled to 1 μm-10 μm (but not limited to this), which not only preserves the alignment error space, but also ensures that the movement error after alignment is within a small range, and ensures that the substrate 1 and the cover 2 The alignment accuracy.
[0040] The specific structural forms of the first limiting member 11 and the second limiting member 21 can be various, as long as the first limiting member 11 and the second limiting member 21 cooperate to realize the contact between the base plate 1 and the cover plate 2. It is sufficient to limit the position. In this embodiment, the first limiting member 11 includes at least one columnar structure, and the second limiting member 21 includes a structure capable of surrounding the at least one columnar structure. Frame structure of limit space.
[0041] In this embodiment, the columnar structure is a cylinder with a bottom diameter of 20 μm-100 μm, but it is not limited to this.
[0042] The specific number of the columnar structure can be set according to actual needs. The frame-shaped structure can be a regular rectangle, a circle, etc., or an irregular structure, and one limit space can correspond to one columnar structure. , It can also correspond to more than two columnar structures in one limit space.
[0043] In this embodiment, the second limiting member 21 includes a frame-shaped structure formed by at least three sides. When the substrate 1 and the package cover 2 are aligned, the columnar structure is inserted At the corners of the frame structure, the substrate 1 and the package cover 2 are restricted.
[0044] In this embodiment, the side length of one side of the frame structure is 0.5 mm-1 mm, but it is not limited to this.
[0045] Further, at least one opening communicating with the limiting space is provided on the frame structure, and the setting of the opening plays a role of stress relief.
[0046] The materials and forming processes of the first limiting member 11 and the second limiting member 21 can be various. In this embodiment, the first limiting member 11 and the second limiting member 21 are It is composed of resin photoresist, which can be formed by coating and photolithography processes with a height of 5μm-15μm (not limited to this). On this basis, the opening of the frame structure can also be set To discharge the excess glue.
[0047] The setting position of the opening can be set according to actual needs. In this embodiment, the opening is provided between two adjacent sides of the frame-shaped structure, or the opening is provided on each side of the frame-shaped structure. The middle of the side.
[0048] In order to enhance the limiting effect, in this embodiment, the second limiting member 21 further includes a plurality of limiting strips located inside the frame-shaped structure, and the extension direction of each limiting strip corresponds to the corresponding frame-shaped structure. Corresponding edges of the structure intersect, and two adjacent limiting strips and the corresponding edges of the frame-shaped structure are enclosed to form a sub-limiting space that defines the columnar structure.
[0049] The base plate 1 and the cover plate 2 are aligned, and a columnar structure is accommodated in a sub-limiting space, which more effectively ensures the alignment accuracy of the base plate 1 and the cover plate 2.
[0050] There may be multiple specific positions and specific structures of the limit bar. In one implementation of this embodiment, the opening is disposed between two adjacent sides of the frame structure, and the limit One end of the strip is connected to the side of the frame-shaped structure, and a gap is provided between the limit strips on two opposite sides of the frame-shaped structure, such as Figure 4 with Figure 5 As shown, Figure 4 The middle frame structure is composed of four sides, Figure 5 The middle frame structure is composed of three sides, but it is not limited to this.
[0051] In another implementation manner of this embodiment, the opening is provided in the middle of each side of the frame-shaped structure, the first end of the limiting strip is directly opposite to the corresponding opening, and the limiting There is a preset distance between the first end of the bar and the corresponding opening, and the second end of the limit bar intersects with other limit bars, such as Image 6 Shown.
[0052] In another implementation of this embodiment, there may also be a gap between the second end of the limiting strip and other limiting strips.
[0053] In this embodiment, in order to facilitate the limiting connection between the columnar structure and the frame structure, a lubricant is arranged in the frame structure to prevent the first limiting member 11 and the second limiting member 21 from being connected At this time, the friction is too large, so that the alignment of the substrate 1 and the cover plate 2 fails, and the substrate 1 or the cover plate 2 is partially warped.
[0054] In this embodiment, the packaging structure further includes a first sealant layer 3. The substrate 1, the packaging cover plate 2 and the first sealant layer 3 define a sealed space, and the cover plate 2 is provided with filler The second sealant layer 4 is formed by filling the sealed space. During packaging, the second sealant layer 4 is located on the periphery of the device 300 to be packaged, such as Figure 1-3 As shown, the arrangement of the second sealant layer 4 ensures packaging performance.
[0055] In this embodiment, the first sealant layer 3 and the second sealant layer 4 can be ultraviolet curing resin glue or thermosetting resin glue, which have hydrophobic properties, including epoxy resin, glycidyl acrylate , Glycidyl methacrylate, methyl methacrylate, ethyl methacrylate, n-butyl methacrylate, 6,7-epoxyheptyl methacrylate, 2-hydroxyethyl methacrylate Homopolymer or copolymer of monomers, melamine formaldehyde resin, unsaturated polyester resin.
[0056] The specific packaging process is as follows: a first limiting member 11 is provided on the substrate 1, a second limiting member 21 is provided on the cover plate 2, and the second limiting member 21 and the first limiting member 11 can be coupled to the substrate 1 Limit the position with the cover plate 2, coat the first sealant layer 3 and the second sealant layer 4 on the cover plate 2, and coat a small amount of filler material (ie lubricant , The material can be the same as the material of the first sealant layer 3 and the second sealant layer 4, but not limited to this), the first stage 100 absorbs the substrate 1, and the second stage 200 carries the cover plate 2. , Move the first carrier 100 horizontally for alignment, and move the first carrier 100 down after the alignment, so that the first limiter 11 is coupled with the second limiter 21, such as figure 2 As shown, the columnar structure is partially accommodated in the limiting space of the second limiting member 21, the first stage 100 releases the substrate 1, and the pressing is completed with the assistance of the first limiting member 11 and the second limiting member 21 , To ensure alignment accuracy.
[0057] The above are the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made. These improvements and modifications It should also be regarded as the protection scope of the present invention.
