Porous particle specific surface area characterization sensor based on BET gravimetric method and method
A technology of porous particles and specific surface area, applied in the field of sensors, can solve problems such as unsatisfactory
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[0083] Such as Figure 1-7 As shown, the first-level resonant beam 4 is fixed above the base 1 through the first-level resonant beam support structure 3, and the recovery groove 2 is fixed above the base 1 and is located directly below the center position of the first-level resonant beam 4 in the length direction; the first-level resonant beam 4 One end of which is deposited with a primary piezoelectric excitation structure 5, and the other end is deposited with a primary piezoelectric pickup structure 6; the secondary piezoelectric excitation structure 7 is fixed at the center of the length direction of the primary resonant beam 4; the secondary resonant beam array 9 is fixed above the secondary piezoelectric excitation structure 7 through the support structure 8 of the secondary resonant beam array; Composed, and respectively used as a reference beam 902 and a detection beam 901; the secondary piezoelectric pickup structure 10 is deposited on the fixed end of the secondary r...
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