Nano-sensing method and device based on contact/non-contact composite principle
A sensing method, non-contact technology, applied in the direction of measuring devices, electrical devices, instruments, etc., can solve the problem of not giving the mechanical structure of the probe, signal transmission shielding interference, and the inability to realize the actual engineering measurement of large aspect ratio structures, Problems such as inability to measure non-conductor DUTs
Active Publication Date: 2020-10-27
HARBIN INST OF TECH
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Problems solved by technology
The technical characteristics of the sensing technology scheme are: (1) The scheme uses the Schottky radiation effect as the sensing principle, which is a non-contact sensing principle, and can theoretically achieve rapid measurement without damage; (2) The research literature is A preliminary exploration of the principle, the probe is composed of solid metal rods and metal balls directly welded, no complete and specific technical solutions have been given for the measurement of structures with large aspect ratios, and no mechanical structure and signal transmission of the probe have been given and shielding interference, etc., it is impossible to realize the actual engineering measurement of the structure with large aspect ratio; (3) the solution cannot measure the non-conductor DUT
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[0038] figure 2 As another embodiment of the present invention, the measurement drive mechanism 5 drives the object under test 15 . Fix the test piece 15 on the measurement drive mechanism 5, and the test drive mechanism 5 drives the test piece 15 close to the micro-probe 6 of the composite principle probe 1 to complete the measurement. The composite principle probe 1 is connected and fixed with the probe attitude adjustment mechanism 3 and the anti-collision safety protection mechanism 4, and can be installed on the Z-axis motion mechanism of the coordinate machine for easy measurement.
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Abstract
A contact / non-contact composite principle nano-sensing method and a contact / non-contact composite principle nano-sensing device belong to the precision sensing and measuring technology. The method comprises the following steps: by adopting quantum tunneling and spherical scattering field composite principle for sensing for a conductor object under measurement, firstly using the spherical scattering field principle to obtain rough measurement results of an aiming gap, directly adjusting the aiming gap of the object under measurement and a micro-measuring ball accordingly to a tunneling workinginterval, then converting the aiming gap into a sensing signal by generating a quantum tunneling effect; by adopting a contact detection principle for sensing for a non-conductor object under measurement, and transmitting the displacement of the micro-measuring ball from an elastic transmission mechanism to a sensitive unit after contacting the object under measurement, and converting the displacement into a sensing signal. The invention also provides a composite principle nano-sensing device. The invention effectively takes into account the nano-resolution, three-dimensional isotropic and non-contact sensing characteristics when measuring the conductor object under measurement, and can also perform the measurement for non-conductor objects under measurement, thereby enabling high-resolution measurement of large aspect ratio micro / nano / micro structures.
Description
technical field [0001] The invention belongs to the technical field of precision sensing and measurement, and mainly relates to a contact / non-contact composite principle nano-sensing method and device. Background technique [0002] With the increasing level of precision machining and manufacturing, micro-nano / micro structures with large aspect ratio features are applied in cutting-edge technology fields, and sensing methods and sensing probes for precision measurement of such structures have become current Research hotspots. High resolution and aiming accuracy, three-dimensional isotropy and non-destructive rapid measurement capabilities are the key elements to realize high-precision measurement of large aspect ratio structures. However, it is difficult to achieve nanoscale high resolution, three-dimensional isotropy, large aspect ratio measurement capability and non-destructive Effective balance of measurement characteristics and high-precision measurement. [0003] At p...
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IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 崔俊宁边星元陆叶盛谭久彬
Owner HARBIN INST OF TECH
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