A kind of X-ray layered multilayer film grating structure with inclined side wall

Abstract

The invention relates to a sidewall inclined X-ray layered multilayer film grating structure comprising periodically distributed multilayer film stacks. The central position of the multilayer film stacks coincides with the central position of each grating period, and the wide ratio of the multilayer film stacks monotonically increases from the top to the bottom, wherein the wide ratio refers to the ratio of the lateral width of the multilayer film stacks to the grating period at any height position of the multilayer film stacks, and the thickness of the periodic film layers also monotonicallyvaries from the surface to the substrate. Compared with the structures in the prior art, the shortcomings of the conventional sidewall vertical high-aspect-ratio layered multilayer film grating structure that is difficult to manufacture and poor in mechanical stability can be overcome, the stability and the service life of the grating elements can be remarkably improved and the highest efficiencyof the grating remains unchanged; besides, the film stack structure of which the upper part is narrow and the lower part is wide can further improve the effective penetration depth of X-rays so that higher resolution and spectral purity can be obtained. The structure can be used as the key reflective element for high-resolution X-ray spectrum measurement.

Description

Technical field [0001] The invention belongs to the technical field of multilayer film reflective elements, and relates to an X-ray multilayer film grating element, in particular to a sidewall inclined X-ray layered multilayer film grating structure. Background technique [0002] X-ray spectroscopy technology is an important method for analyzing information such as material composition, atomic structure and electronic valence. It has important applications in materials science, astrophysics, life science and other fields. The X-ray monochromator is a key element in the X-ray spectrometer, and its spectral resolution determines the detection accuracy of the material composition and structure. [0003] In the hard X-ray band, natural crystal is a good monochromatic element, but due to the limitation of the crystal plane spacing, it is difficult to apply to the soft X-ray band. Multilayer film is an extension of natural crystal in the middle and low energy range. As a one-dimensional...

AI Technical Summary

Problems solved by technology

However, the development of high-resolution and high-efficiency layered multilayer film gratings requires the production of a multilayer film stack structure with a width of about 100nm, an aspect ratio greater than 10, and vertical sidewalls, which poses a high challenge to the manufacturing process.

The mechanical stability of this layered structure with a large aspect ratio is also poor, and it may collapse and be damaged during fabrication and subsequent applications, seriously affecting the actual optical performance.

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