A screening process of Kovar alloy for magnetron
A magnetron and alloy technology, applied in the field of magnetrons, can solve problems affecting the performance of magnetrons, and achieve the effects of eliminating hidden dangers of vacuum leaks, optimizing inspection results, and reducing failure rates.
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Embodiment 1
[0028] A screening process for Kovar alloys for magnetrons, the screening process comprising the following steps: sequentially annealing Kovar alloys; alternating high and low temperature treatments; microstructure inspection, rejecting unqualified products; vacuum airtightness Inspection; vacuum degassing.
Embodiment 2
[0030] A screening process for Kovar alloys for magnetrons, the screening process comprising the following steps: sequentially annealing Kovar alloys; alternating high and low temperature treatments; microstructure inspection, rejecting unqualified products; vacuum airtightness inspection; vacuum degassing;
[0031] Wherein, the annealing treatment is performed in a hydrogen atmosphere.
Embodiment 3
[0033] A screening process for Kovar alloys for magnetrons, the screening process comprising the following steps: sequentially annealing Kovar alloys; alternating high and low temperature treatments; microstructure inspection, rejecting unqualified products; vacuum airtightness inspection; vacuum degassing;
[0034] Wherein, the annealing treatment is carried out in an atmosphere of hydrogen;
[0035] The specific operation of the annealing treatment is as follows: in a hydrogen furnace, first heat the Kovar alloy to 850°C and keep it for 30 minutes; then lower the temperature to 150°C and keep it for 30 minutes; then raise the temperature to 950°C and keep it for 60 minutes; then cool down to 150°C , keep warm for 30min; then heat up to 1050°C, keep warm for 30min; then cool down to 150°C, keep warm for 30min; then heat up to 1100°C, keep warm for 15min; then cool down to 150°C, keep warm for 30min; finally cool to room temperature;
[0036] The cooling rate is 5°C / min;
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