mems tunable vcsel driven swept source oct for 3d measurement applications
A light source and measuring probe technology, applied in the field of optical probe system, can solve the problem of low frequency response of high-frequency signals
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0090] The invention describes the best contemplated mode of carrying out the invention. The description is not intended to be construed in a limiting sense, but to provide examples of the present invention, which, in conjunction with the accompanying drawings, are for descriptive purposes only, so that those skilled in the art can understand the benefits and structure of the present invention. In the different views, the same reference numerals designate the same or similar parts.
[0091] 1: Swept source CMM with improved resolution and depth range
[0092]This section discloses optical instruments for measuring dimensional characteristics of reflective objects. The instrument uses optical coherence tomography (OCT) and has both sparse and dense sampling capabilities. The OCT system has the ability to measure the height information of objects at high speed. The measured object height serves as a closed-loop control of two important parameters: beam focusing conditions i...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


