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Testing device and method

A testing device and testing instrument technology, applied in the field of spectral testing and analysis technology and display, can solve the problems of poor accuracy of film composition test results, poor reproducibility of infrared spectrum, etc., and achieve the effect of solving poor reproducibility and improving accuracy

Active Publication Date: 2019-02-12
HKC CORP LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, in the exemplary technology, the micro-infrared spectrometer tests the composition of the film in the atmospheric environment. Due to the constant changes in the content of water and carbon dioxide in the atmospheric environment, the reproducibility of the infrared spectrum is poor, which leads to the inconsistency of the test results of the film composition. poor accuracy

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Embodiment Construction

[0038] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described through implementation with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are the embodiment of the present invention. Some, but not all, embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0039] figure 1 It is a schematic structural diagram of a test device provided by an embodiment of the present invention. refer to figure 1 , the test device comprises: a base 10; a tester 20 arranged on the base 10; an outer shell 30 surrounding the tester 20; wherein, the base 10 is sealingly connected with the outer shell 30, and the outer shell 30 ...

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Abstract

The invention discloses a testing device and method. The testing device comprises a base, a tester arranged on the base and a shell cover surrounding the tester, wherein the base and the shell cover are connected in a sealed mode, and the shell cover is provided with a first opening, a second opening and an air outlet; the first opening is used for filling the tester with a first fluid to adjust the temperature in the tester; and the second opening is used for continuously filling the shell cover with a second fluid to enable air in the shell cover be exhausted from the air outlet. According to the testing device, the tester is additionally provided with the shell cover, the shell cover and the base are connected in the sealed mode, the influence of air components in a testing environmenton a testing result is eliminated through the second fluid, and thus the accuracy of a film layer component testing result is improved.

Description

technical field [0001] Embodiments of the present invention relate to spectrum test analysis technology and display technology, and in particular to a test device and method. Background technique [0002] In the thin film transistor-liquid crystal display (Thin Film Transistor-Liquid Crystal Display, TFT-LCD) structure, the formation of thin film transistors on the array substrate usually requires physical vapor deposition (Physical Vapor Deposition, PVD) and chemical vapor deposition (Chemical Vapor Deposition, CVD) film forming technology. Among them, the composition of the film layer formed by CVD directly affects the switching performance of the thin film transistor. Generally, an infrared spectrometer is used to detect the composition of the film layer. In order to obtain accurate test results, a microscopic infrared spectrometer is required to test the composition of the film layer. [0003] However, in the exemplary technology, the micro-infrared spectrometer tests ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3563
CPCG01N21/3563
Inventor 轩海霞蒋萌曾以亚
Owner HKC CORP LTD