A method and apparatus for data comparison

A data comparison and data technology, applied in data processing applications, electrical digital data processing, digital data information retrieval, etc., can solve the problem of picky comparison methods and achieve the effect of wide applicability

Pending Publication Date: 2019-02-12
洪启集成电路(珠海) 有限公司
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Problems solved by technology

[0005] It can be seen that data comparison is accompanied by the entire integrated circuit manufacturing process. However, data comparison in different links is different in terms of data type, sample size, data distribution, and the influence of outliers. Picky

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  • A method and apparatus for data comparison

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Embodiment Construction

[0044] The technical solutions of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0045] Such as figure 1 Shown is the flow chart of the data comparison method that the present invention proposes, comprises the following steps:

[0046] Step 1: Sample data collection;

[0047] Step 2: Outlier detection and exclusion;

[0048] Step 3: Engineering index verification. If the verification result fails, the current sample data is unacceptable. If the verification result passes, go to step 4;

[0049] Step 4: Determine whether the current overall sample data distribution type is known, if yes, go to step 5, if not, go to step 6;

[0050] Step 5: Carry out the parameter comparison method, if it passes, the current sample data is acceptable, if not, go to step 7;

[0051] Step 6: Perform overall sample data distribution type detection, if the distribution type detection passes, then go to ste...

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Abstract

A method and apparatus for data comparison is applied to the comparative analysis of daily data in semiconductor industry. The method includes collecting the sample data, detecting and eliminating theoutlier, verifying the engineering index, judging whether the current distribution type of population sample data is known, detecting the distribution type of population sample data, and carrying outa parameter comparison method, a non-parameter statistical comparison method and the engineering method determination and so on. The invention provides a complete set of data comparison method and apparatus with wide trial range, which is used for guiding the daily data comparison and analysis practice in semiconductor industry.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a data comparison method and device. Background technique [0002] Semiconductor manufacturing, as one of the most complex processes in modern industry, contains hundreds of complex process steps, including photolithography, etching, thin film, diffusion and cleaning. The realization of these complex process steps naturally requires the joint efforts of hundreds of machines. Due to the limitation of production capacity, it is impossible to complete each step of the process by the same machine. Different types of machines, even machines of the same type, inevitably have deviations, which will inevitably cause fluctuations in the quality and reliability of the final product. and impact. How to compare and identify the consistency of machines of the same type to ensure stable production has become one of the problems of Tool Match. [0003] In the research and development ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F16/2455G06F16/2458G06F16/215G06K9/62G06Q50/04G06Q10/06
CPCG06Q10/06393G06Q10/06395G06Q50/04G06F18/2433Y02P90/30
Inventor 不公告发明人
Owner 洪启集成电路(珠海) 有限公司
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