A detection device for variable area displacement capacitance
A capacitance detection and detection device technology, which is applied in the direction of instruments, can solve the problem of low displacement detection accuracy, and achieve the effect of simple structure, avoiding influence, and improving accuracy
Active Publication Date: 2020-05-19
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology
[0011] Aiming at the deficiencies of the existing displacement capacitance detection, the present invention provides a variable area displacement capacitance detection device, which aims to solve the problem in the prior art that the change of the capacitance plate spacing has an impact on the capacitance detection, resulting in low displacement detection accuracy. question
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[0029] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0030] It can be seen from the above analysis that the existing capacitance-displacement detection method is easily affected by the change of the spacing, which will affect our detection accuracy and bring errors. In order to eliminate the influence of the spacing change, when the feedback capacitor is designed in the structure in the form of a pole plate, the value of the feedback capacitor is:
[0031]
[0032] where A f It is the opposite area of the feedback capacitor in the plate and remains unchanged during the movement, and the size of the feedback capacitor is only related to...
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The invention provides a variable-area displacement capacitance detection device, which includes a variable-area displacement capacitance detection structure, a driving voltage module and a charge amplifier. The variable-area displacement capacitance detection structure includes a detection capacitor and a moving block. The driving voltage module generates positive and negative driving carriers for displacement capacitance detection and loads the positive and negative driving carriers on the detection capacitor. The charge amplifier includes a feedback capacitor, a feedback resistor and an operational amplifier, and is used for calculating the ratio of the differential capacitance change caused by small displacement to the feedback capacitance and converting the ratio into a voltage signal. When the external displacement is detected, the displacement in the direction of detection changes the front area of the detection capacitor, so that the size of the detection capacitor changes. Thepurpose of displacement detection is achieved by detecting the capacitance change generated due to area change. The influence of the change of distance between the moving and fixed pole plates on differential capacitance is eliminated, and the accuracy of displacement capacitance detection is improved.
Description
technical field [0001] The invention belongs to the field of displacement measurement, and more particularly, relates to a detection device of a variable-area displacement capacitance. Background technique [0002] Variable area displacement capacitance detection is a method of displacement detection, which is of great significance in the fields of inertial sensing and displacement measurement. Capacitive displacement detection is a way to detect the change of displacement by detecting the capacitance of parallel plates. According to the definition of capacitance of parallel plates ε is the dielectric constant of the medium between the plates, A is the facing area of the plates, and d is the distance between the plates. Generally speaking, the dielectric constant between the capacitor plates is constant, so the capacitance detection methods can be divided into two categories: one is the variable area displacement capacitance detection, and the other is the variable spaci...
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IPC IPC(8): G01D18/00
CPCG01D18/00
Inventor 涂良成严世涛许强伟伍文杰
Owner HUAZHONG UNIV OF SCI & TECH