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A composite comparison method vacuum calibration system and method

A technology of calibration system and calibration method, which is applied in the direction of instruments, measuring devices, measuring fluid pressure, etc., can solve the problems of vacuum calibration that cannot be integrated with multiple calibration methods, and the calibration system cannot meet the needs of wide range calibration range, etc.

Active Publication Date: 2021-09-14
BEIJING DONGFANG MEASUREMENT & TEST INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem to be solved by the invention is to solve the vacuum calibration problem that the existing calibration system cannot meet the needs of a wide range of calibration range and cannot integrate multiple calibration methods

Method used

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  • A composite comparison method vacuum calibration system and method
  • A composite comparison method vacuum calibration system and method
  • A composite comparison method vacuum calibration system and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] Use this system to calibrate a Pirani gauge with a range of 1×10 5 Pa~1×10 -1 Pa. It is calibrated using the system's static comparison and static expansion methods.

[0068] 1) Use the static comparison method, as follows:

[0069] S1. Keep the ambient temperature at 23±2°C, install the calibrated vacuum gauge on the equatorial flange of the first vacuum chamber VC1, turn on the mechanical pump RP and the third vacuum valve V3 in turn to evacuate the first vacuum chamber VC1.

[0070] S2. The pressure in the first vacuum chamber VC1 is less than 1×10 0 After Pa, close the third vacuum valve V3.

[0071] S3. Directly introduce the gas in the gas cylinder into the first vacuum chamber VC1 through the seventh vacuum valve V7 and the fifth vacuum valve V5, and record the reading of the reference standard vacuum gauge as P1=1.05×10 4 Pa, the calibrated vacuum gauge reading P2 = 1.2 × 10 4 Pa. Therefore, the correction factor C=Pstandard / Pcorrected=P1 / P2=0.875.

[00...

Embodiment 2

[0081] Use this system to calibrate an ionization vacuum gauge with a range of 1×10 -1 Pa~1×10 -5 Pa. Calibrate it using the system's dynamic comparison and dynamic flow methods.

[0082] 1) Use the dynamic comparison method, as follows:

[0083] S1. Keep the ambient temperature at 23±2°C, install the calibrated vacuum gauge on the equatorial flange of the first vacuum chamber VC1, turn on the mechanical pump RP and the third vacuum valve V3 in turn to evacuate the first vacuum chamber VC1.

[0084] S2. The pressure in the first vacuum chamber VC1 is less than the threshold 1×10 2 After Pa, close the third vacuum valve V3.

[0085] S3. Turn on the first vacuum valve V1, the molecular pump TMP and the second vacuum valve V2 in sequence to evacuate the first vacuum chamber VC1.

[0086] S4. The pressure in the first vacuum chamber VC1 is less than the threshold 1×10 -6 After Pa, close the first vacuum valve V1. Open the tenth vacuum valve V10 to evacuate the second vacuum...

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Abstract

The present invention provides a vacuum calibration system and method using a composite comparison method, comprising: a mechanical pump, a molecular pump, a first vacuum chamber, a second vacuum chamber, first to third vacuum gauges, first to tenth vacuum valves, gas bottle, the first to the third opening; the pumping outlet of the molecular pump is connected to the mechanical pump through the first vacuum valve, and its pumping inlet is connected to the first vacuum chamber through the second vacuum valve and the third opening; It is connected to the mechanical pump through the third vacuum valve; the first vacuum chamber is connected with the third vacuum gauge, and the second vacuum gauge is connected through the fourth vacuum valve; the first opening is through the fifth vacuum valve, and the second opening is through the first The sixth vacuum valve is connected to the seventh vacuum valve and then connected to the gas cylinder; the eighth vacuum valve is connected to the second vacuum chamber, and the second vacuum chamber is connected to the first vacuum gauge and connected to the mechanical pump through the tenth vacuum valve. The invention integrates multiple detection technologies on one piece of equipment, which can save equipment cost and expand the calibration range.

Description

technical field [0001] The invention belongs to the technical field of vacuum calibration, and relates to a vacuum calibration system method of a compound comparison method. Background technique [0002] Vacuum technology is widely used in many industries such as aerospace, high-energy physics, semiconductors, microelectronics, automobile manufacturing, refrigeration, solar energy, navigation, ships, etc. In national defense and military scientific research and production units, it is particularly critical for the vacuum measurement and testing technical team to ensure product quality and mission success. On the contrary, since vacuum measurement and calibration equipment is a non-standardized equipment, there are no mature products in the world, and the measurement units are developed by themselves. Only a few domestic units, mainly aerospace units, have invested a lot of money to establish high-level experiments. The equipment in the laboratory is relatively simple, gener...

Claims

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Application Information

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IPC IPC(8): G01L27/00
CPCG01L27/002
Inventor 柏向春田虎林王欢董云宁卢耀文
Owner BEIJING DONGFANG MEASUREMENT & TEST INST