A large-scale vacuum chamber manufacturing process

Abstract

The invention relates to the technical field of vacuum film-coating equipment manufacturing, and discloses a large vacuum cavity manufacturing process. The large vacuum cavity manufacturing process comprises the following process steps of: (1) unloading steel plates; (2) welding; (3) performing vibrating ageing treatment; (4) processing a bottom datum plane; and (5) processing a top sealing surface. In the vibrating ageing treatment process, a vibrating ageing machine is connected with a vacuum cavity through a balance beam of a star-shaped structure; the vibrating ageing machine is arranged on the centre part of the balance beam of the star-shaped structure; and each cantilever end of the balance beam of the star-shaped structure is connected to the top sealing surface of the vacuum cavity. The large vacuum cavity manufacturing process improves stress release uniformity during stress-relieving treatment after the vacuum cavity is welded, reduces abnormal deformation after stress-relieving treatment, and improves machining precision.

Description

technical field [0001] The invention relates to the technical field of vacuum coating equipment manufacturing, in particular to a large-scale vacuum chamber manufacturing process. Background technique [0002] Vacuum chamber is the core part of large-scale vacuum coating equipment. Such as Figure 6 Shown is a large-scale vacuum chamber with a typical structure. The shape of the large-scale vacuum chamber is an austenitic stainless steel welded structural member with a rectangular parallelepiped structure. The length exceeds 10 meters, the height exceeds 4 meters, and the width exceeds 2 meters. The upper part of the vacuum chamber is provided with a flange sealing surface, and the bottom is provided with a datum surface for machining positioning. [0003] In the prior art, the manufacture of the above-mentioned large vacuum chamber has the following problems: [0004] One is that due to the large size of the parts, the stress relief treatment after welding mostly adopts v...

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Problems solved by technology

However, since the vibration aging machine is fixed at a certain position, the exciting force of the vibration aging machine will attenuate with the increase of the distance. During the vibration aging, the part of the stress close to the vibration aging machine will be released first, and the stress far away from the vibration aging machine will be released. Post-release, making the time and magnitude of stress release inconsistent

And because the strength of each part of the vacuum chamber is different, the inconsistency of the above-mentioned stress release, especially the overload of the excitation force in the weaker part of the vacuum chamber, will lead to abnormal deformation of each part of the vacuum chamber after vibration aging, and The sealing surface of the upper flange of the vacuum chamber is deformed and uneven, and the thickness of the flange surface is uneven after machining, which affects its appearance quality and final sealing performance

[0005] The second is that during mechanical processing, the machining of the bottom reference surface is based on the upper flange sealing surface, and the flange sealing surface is the blank surface when clamping. Due to the large size of the parts, the clamping adopts multi-point positioning clamping, and multi-point positioning When clamping and pressing, the compression deformation of the flange sealing surface will be inconsistent, resulting in elastic recovery deformation of the processed bottom datum surface after the processing is completed and the clamping is removed, making the processed bottom datum surface uneven, thus Reduced accuracy of subsequent finishing flange sealing surfaces

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