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Vacuum indoor online motion monitoring temperature measuring device

A technology of temperature measurement and motion monitoring, applied in measuring devices, thermometers, measuring heat, etc., can solve problems such as inaccurate measurement of product surface temperature, achieve the effect of improving stability and goodness, and ensuring stability

Pending Publication Date: 2019-03-01
HUNAN YUFENG VACUUM SCI & TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide an online motion monitoring temperature measurement device in a vacuum chamber to solve the problem of inaccurate measurement of product surface temperature in the vacuum chamber

Method used

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  • Vacuum indoor online motion monitoring temperature measuring device
  • Vacuum indoor online motion monitoring temperature measuring device
  • Vacuum indoor online motion monitoring temperature measuring device

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Embodiment Construction

[0013] In order to facilitate the understanding of the present invention, the present invention will be described more fully and in detail below in conjunction with the accompanying drawings and preferred embodiments, but the protection scope of the present invention is not limited to the following specific embodiments.

[0014] Such as figure 1 — Figure 4 As shown, a kind of on-line movement monitoring temperature measurement device under vacuum in this embodiment includes a loading trolley 1 and a vacuum chamber 2. The loading trolley 1 is provided with a pallet 102 and a movable plate 101, and the workpiece is placed on the movable plate 101. An annular groove is provided on the tray 102, and a ball 103 is arranged in the annular groove. The movable disk 101 is placed on the tray 102, and the movable disk 101 and the tray 102 are contacted by the ball 103. The movable disk 101 can rotate axially, and the tray Positioning hole is provided on 102, movable plate 101 is provi...

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Abstract

The invention discloses a vacuum indoor online motion monitoring temperature measuring device. The device comprises a loading trolley and a vacuum chamber. The center of a moving disc on the loading trolley is provided with a driving seat which is extended to the bottom of the loading trolley. The bottom surface of the driving seat is provided with a through groove, a thermocouple terminal and a connection block connected to the thermocouple terminal. The terminal is connected to a thermocouple. The transmission shaft of the bottom of the vacuum chamber is fixed with a driving block and a connection column. A spring and a spherical surface body are arranged in the connection column. The driving block is located in the through groove. The spherical surface body is embedded into a sphericalsurface groove on the connection block under the effect of the spring. The other end of the transmission shaft is sealed through a signal column and the signal column is provided with a conducting ring. The internal portion of the transmission shaft is connected to the conducting ring and the spring through a lead. A temperature control instrument is connected to the conducting ring through a carbon brush. The actual temperature of a product surface can be measured in real time, and simultaneously, the problem of an inaccurate temperature measurement caused by workpiece loading trolley movement is solved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to an online motion monitoring temperature measuring device in a vacuum chamber. Background technique [0002] The quality of vacuum coating products has a great relationship with the temperature. In the single coating machine for hardware tools, hardware molds, and electronic industry supplies, the trolley that loads the product is in a linear or rotating state. The temperature measuring device is only fixed at a certain point in the vacuum chamber, and it measures the temperature of the surrounding area of ​​this point. However, the entire vacuum chamber has a large space, and the temperature in each area is uneven, which makes the measurement impossible in real time. Reflect the actual temperature of the product surface, resulting in inaccurate temperature reflection and inaccurate measurement, seriously affecting the yield of the product. Contents of the invention [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/02
CPCG01K7/023
Inventor 舒逸刘光斗李赞
Owner HUNAN YUFENG VACUUM SCI & TECH CO LTD
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