Self-purifying device for exhaust port of single-crystal furnace

Abstract

The invention provides a self-purifying device for an exhaust port of a single-crystal furnace, comprising a first rotating device, a second rotating device and a cleaning device. The first rotating device cooperates with the second rotating device, and the cleaning device is connected with the second rotating device. The self-purifying device for the exhaust port of the single-crystal furnace hasthe advantages that by means of worm-gear cooperation, the cleaning device is connected with a worm gear, the cleaning device is rotated by the worm gear, an exhaust pipe is cleaned, the working is reliable, the cleaning efficiency is high, oxides deposited are continuously cleaned during the operation of a furnace body, the oxide accumulation is prevented from blocking the exhaust pipe, the working efficiency of the single-crystal furnace is improved, and the quality of a single crystal is improved.

Description

technical field [0001] The invention belongs to the technical field of single crystal production equipment, and in particular relates to a self-purifying device for an exhaust port of a single crystal furnace. Background technique [0002] During the operation of the single crystal furnace, a large amount of oxides will be discharged from the furnace through the exhaust system of the furnace body. Generally, the exhaust system is designed at the bottom of the furnace, and the oxides will be transported to the exhaust pipe outside the furnace through the exhaust pipe in the furnace body and finally discharged out of the furnace. Body, in the area where the exhaust pipe in the furnace and the exhaust pipe outside the furnace are connected, is in the position where the heat and cold are transferred, and the oxides will be deposited and adsorbed here. After a long time of operation, more and more oxides will accumulate and eventually the exhaust port Blockage will lead to paraly...

AI Technical Summary

Problems solved by technology

[0002] During the operation of the single crystal furnace, a large amount of oxides will be discharged from the furnace through the exhaust system of the furnace body. Generally, the exhaust system is designed at the bottom of the furnace, and the oxides will be transported to the exhaust pipe outside the furnace through the exhaust pipe in the furnace body and finally discharged out of the furnace. Body, in the area where the exhaust pipe in the furnace and the exhaust pipe outside the furnace are connected, is in the position where the heat and cold are transferred, and the oxides will be deposited and adsorbed here. After a long time of operation, more and more oxides will accumulate and eventually the exhaust port Blockage, leading to paralysis of the exhaust system, ultimately affecting the crystallization effect and quality

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