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44results about How to "Improve single crystal quality" patented technology

Growth method of germanium-doped SiC body single-crystal material

The invention provides a growth method of a germanium-doped SiC body single-crystal material. The method adopts a sublimation method to make germanium-doped single crystals grow in a high-temperature single-crystal growth furnace and comprises the specific growth steps that the positions of high and low temperature zones are determined according to the shape of a residual material left at the bottom of the inside of a crucible after crystal growth; a dopant is put at the corresponding positions of the high and low temperature zones respectively to make the crystals grow; cooling is performed to reach room temperature, and high-quality germanium-doped SiC single crystals are obtained. The method enables the germanium element to be put in the high and low temperature zones respectively according to the temperature field distribution characteristics of induction heating, achieves uniform doping in the whole crystal growth process, controls the vapor pressure of the germanium at a preliminary growth stage, prevents germanium atom agglomeration on the growth face and achieves uniform doping in the radial and axial directions. The crystal defects and internal stress are reduced. Obtained single-crystal defects are few, the single-crystal quality is high, and the stress is small.
Owner:SHANDONG UNIV

Preparation method of heterogeneous integrated monocrystal diamond film

The invention relates to a preparation method of a heterogeneous integrated monocrystal diamond film. The preparation method at least comprises the following steps: providing a diamond substrate, carrying out ion implantation on the upper surface of the diamond substrate, forming a defect layer at a preset depth, and setting the diamond substrate on the defect layer as a substrate thin layer; growing a homogeneous epitaxial diamond film layer on the surface of the substrate thin layer; forming a first bonding dielectric layer on the surface of the diamond film layer; providing a heterogeneoussubstrate, and forming a second bonding dielectric layer on the upper surface of the heterogeneous substrate; bonding the first bonding dielectric layer and the second bonding dielectric layer to forma bonding structure; stripping the bonding structure along the defect layer to form a heterostructure; and performing surface treatment on the stripping surface of the heterostructure to remove the residual defect layer and the substrate thin layer. According to the method, the homoepitaxy monocrystal diamond film is integrated on the heterogeneous substrate through the ion implantation and bonding process, the large-area and high-quality diamond film is obtained, and an advanced material platform is provided for photon and quantum sensing device application.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Single-crystal electromagnetic field

The invention discloses a mono-crystal electromagnetic field for being matched with a mono-crystal furnace in the production of semiconducting material, which consists of yoke plates, a concentrating flux plate, magnetic poles and pole heads. One end of each yoke plate is connected with each other by the concentrating flux plate and the other end thereof is connected with the magnetic poles; two magnetic poles are corresponding to each other and the corresponding face of the two magnetic poles is provided with the pole heads; the two yoke plates, the concentrating flux plate and the two magnetic poles form a C-shaped frame; the two yoke plates are respectively fixed on two columns that are connected by a connecting beam; the concentrating flux plate is connected with a cooling system. The mono-crystal electromagnetic field is stable and adjustable, can promote material utilization rate and the property index of a silicon chip and can improve the utilization rate of the material and the performance index of silicon chip. The mono-crystal electromagnetic field can change the exiting mono-crystal furnace to achieve the requirement for improving the quality of monocrystal, can design according to mono-crystal furnaces with different structures to satisfy the requirements of different users and has comparatively simple structure and lower production cost.
Owner:LONGI MAGNET CO LTD

Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device

A method of manufacturing a semiconductor device, includes: forming an insulating layer on a single crystal semiconductor substrate; forming a non-crystalline semiconductor layer on the insulating layer; forming an insulating film on the non-crystalline semiconductor layer; forming an opening section for exposing a part of a surface of the single crystal semiconductor substrate through the insulating film, the non-crystalline semiconductor layer and the insulating layer; forming a single crystal semiconductor layer embedded in the opening section so as to have contact with the non-crystalline semiconductor layer; removing the insulating film and the insulating layer while the single crystal semiconductor layer supporting the non-crystalline semiconductor layer above the single crystal semiconductor substrate; forming a single-crystallized semiconductor layer obtained by single-crystallizing the non-crystalline semiconductor layer using the single crystal semiconductor layer as a seed by providing a thermal treatment on the non-crystalline semiconductor layer from which the insulating film and the insulating layer are removed; filling a gap between the single-crystallized semiconductor layer and the single crystal semiconductor substrate with an embedded insulating layer; forming a gate electrode on the single-crystallized semiconductor layer; and forming in the single-crystallized semiconductor layer a source layer disposed on one side of the gate electrode and a drain layer disposed on the other side of the gate electrode.
Owner:SEIKO EPSON CORP

Surface treatment method for stripping single crystal thin film through ion implantation

The invention belongs to the technical field of single crystal thin films, and particularly relates to a surface treatment method for stripping a single crystal thin film through ion implantation. According to the surface treatment method for stripping the single crystal thin film through ion implantation, argon ion etching is selected for accurately removing a damaged layer on the surface of thesingle crystal thin film prepared through the ion implantation stripping technology; and besides, the problems of oxygen vacancy defects and surface modification of the film after the damaged layer isremoved are solved by respectively controlling the oxygen flux, the working power and the working parameters of the cleaning time in the oxygen plasma cleaning process, the cleaning effect is verified through the contact angle test, and finally, the single crystal thin film is completely infiltrated, so that the subsequent preparation of a graphical device structure is facilitated. According to the method, the single crystal quality of the single crystal thin film is greatly improved, the introduced secondary damage is minimum, and the process complexity is simplified.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Czochralski single crystal thermal field and re-feeding process for thermal field

The Czochralski single crystal thermal field comprises a quartz crucible, a graphite / carbon-carbon crucible, an upper curing heat preservation cylinder, a middle curing heat preservation cylinder and a flow guide cylinder, and further comprises a supporting crucible arranged on the upper end face of the graphite / carbon-carbon crucible and a supporting heat preservation cylinder arranged between the upper curing heat preservation cylinder and the middle curing heat preservation cylinder; the upper end face of the supporting crucible is lower than the upper end face of the quartz crucible, and the height from the upper end face of the supporting crucible to the upper end face of the graphite / carbon crucible is a fixed value; the supporting heat preservation cylinder is connected with the upper curing heat preservation cylinder and the middle curing heat preservation cylinder, and the height of the supporting crucible is the same as that of the supporting heat preservation cylinder. According to the invention, under the condition of not changing the structures of the existing graphite / carbon-carbon crucible, the heater and all the curing heat preservation cylinders, a new quartz crucible with a certain height compared with the conventional quartz crucible is reconfigured, and re-throwing production is carried out in a new thermal field, so that not only can metal impurities entering the czochralski single crystal be reduced, but also the quality of the single crystal can be improved, and the single-edge bract breaking rate can be reduced.
Owner:内蒙古中环晶体材料有限公司

Crystal-guiding and impurity-removal device and method for preparing high-purity alumina polycrystals by virtue of cold crucible

The invention relates to a crystal-guiding and impurity-removal device and method for preparing high-purity alumina polycrystals by virtue of a cold crucible. The device comprises the cold crucible, an electromagnetic induction coil, a double-layer water-cooling copper pipe and a lifting system, wherein a high-purity alumina melt is filled into the cold crucible; the double-layer water-cooling copper pipe is connected to the lifting system which is used for controlling the lifting of the double-layer water-cooling copper pipe; the double-layer water-cooling copper pipe can be inserted into thehigh-purity alumina melt in the cold crucible. According to the method, the double-layer water-cooling copper pipe internally carrying circulating cooling water is inserted into the melt, impuritiesin the melt are gradually condensed to the double-layer water-cooling copper pipe in a directional solidification manner and can be extracted before the melt is completely crystallized and solidifiedin the cold crucible, the purity of alumina can be increased from 99.995% to 99.999%, and high-purity alumina polycrystals do not need to be subjected to crushing and impurity removal, so that a largequantity of manpower and material resources are saved, the filling density of the raw materials in a subsequent single crystal furnace is increased to a certain extent, the quality of sapphire singlecrystal is improved, and the energy sources are saved.
Owner:睿为电子材料(天津)有限公司

A novel re-feeding device for Czochralski grown monocrystalline and an operating method thereof

A novel re-feeding device for Czochralski grown monocrystalline is provided, including a re-feeding cylinder, a quartz umbrella disposed at the lower end of the re-feeding cylinder and a fixed frame at the upper end of the re-feeding cylinder. The re-feeding cylinder sequentially includes, from one end close to the fixed frame, a first cylinder part, a second cylinder part and a third cylinder part. The first, second and third cylinder parts are integrally connected, the inner diameter of the first cylinder part is greater than the inner diameter of the third cylinder part, and the height of the first cylinder part is not less than the height of the third cylinder part. The re-feeding device can increase the re-feeding amount of each cylinder, can reduce the oxygen content of head gaps ofmonocrystalline silicon rods, and can improve monocrystalline silicon quality. The service lifetime of the re-feeding device is prolonged, the production efficiency is increased and the production cost is reduced. The invention also provides an operating method of the novel re-feeding device for Czochralski grown monocrystalline. The method is particularly suitable for re-feeding for monocrystalline silicon with a large size and a large feeding amount. Through the method, quality of monocrystalline silicon rods can be ensured, and the crystal yield is increased by about 4%.
Owner:INNER MONGOLIA ZHONGHUAN SOLAR MATERIAL

Fixing device and fixing method for seed crystal or substrate in single crystal growth of aluminum nitride

ActiveCN107687023AAvoid disadvantagesConducive to play a single crystal inductionPolycrystalline material growthFrom condensed vaporsGas phaseCrucible
The invention discloses a fixed device and a fixing method for a seed crystal or a substrate in the single crystal growth of aluminum nitride. A detachable growth platform is arranged between an aluminum nitride powder source and a crucible head cover, so that the seed crystal or substrate material is fixed by means of gravity or in a mechanical mode, crystal growth can be carried out on double surfaces of the seed crystal or substrate simultaneously by setting a first gap and a second gap, the crystal growth efficiency is relatively high, the problem of seed crystal fixation is effectively solved, various adverse factors caused by adhesion of the seed crystal are avoided, and advantages are provided for homoepitaxial growth of aluminum nitride; the seed crystal or substrate gets close toa high temperature area from a low temperature area, a gas phase substance generated through degradation of the aluminum nitride powder source has preferable transfer ability in the high temperature area, and is beneficial for further homoepitaxial/heteroepitaxial growth to further enlarge crystal size; the formation of a white ceramic layer can be avoided completely on the surface of the seed crystal, the single crystal induction effect of the seed crystal is developed, and the aluminum nitride single crystal obtained through the method has extremely high single crystal quality and has relatively high crystal growth rate.
Owner:ULTRATREND TECH INC

Band-gap modified Ge CMOS integrated device and manufacturing method thereof

The invention relates to a band-gap modified Ge CMOS integrated device and a manufacturing method thereof. The manufacturing method comprises the steps of: selecting an Si substrate; growing a Ge thin film layer and a Ge layer on the Si substrate; growing a GeSn layer on the Ge layer; manufacturing an STI in the GeSn layer and the Ge layer; depositing a gate dielectric layer and a gate layer on the surface of the GeSn layer; etching the gate dielectric layer and the gate layer and forming gate regions of a PMOS device and an NMOS device; and carrying out ion implantation on the surface of the GeSn layer to form a PMOS device source-drain region and an NMOS device source-drain region of the CMOS integrated device, applying mechanical stress to the to-be-modified CMOS integrated device by a stress applying device and finally forming the band-gap modified Ge CMOS integrated device. A channel material utilized by the CMOS device is a direct band-gap modified Ge material; the carrier mobility of the channel material is improved by multiple times in comparison with that of a traditional Si material; the current drive and frequency characteristics of the CMOS integrated device are improved; and the device is suitable for monolithic optoelectronic integration with a photonic device.
Owner:XIDIAN UNIV

Band gap modified ge CMOS integrated device and its preparation method

The invention relates to a band-gap modified Ge CMOS integrated device and a manufacturing method thereof. The manufacturing method comprises the steps of: selecting an Si substrate; growing a Ge thin film layer and a Ge layer on the Si substrate; growing a GeSn layer on the Ge layer; manufacturing an STI in the GeSn layer and the Ge layer; depositing a gate dielectric layer and a gate layer on the surface of the GeSn layer; etching the gate dielectric layer and the gate layer and forming gate regions of a PMOS device and an NMOS device; and carrying out ion implantation on the surface of the GeSn layer to form a PMOS device source-drain region and an NMOS device source-drain region of the CMOS integrated device, applying mechanical stress to the to-be-modified CMOS integrated device by a stress applying device and finally forming the band-gap modified Ge CMOS integrated device. A channel material utilized by the CMOS device is a direct band-gap modified Ge material; the carrier mobility of the channel material is improved by multiple times in comparison with that of a traditional Si material; the current drive and frequency characteristics of the CMOS integrated device are improved; and the device is suitable for monolithic optoelectronic integration with a photonic device.
Owner:XIDIAN UNIV

Preparation method and application of organic semiconductor two-dimensional molecular crystal material

The present invention provides an organic semiconductor two-dimensional molecular crystal material preparation method and application. The preparation method comprises: an organic semiconductor compound solution is dropped at the water surface, after the solution is volatilized, and an organic semiconductor two-dimensional molecule crystal nucleus is obtained at the water surface; and the organic semiconductor compound solution is continuously dropped at the organic semiconductor two-dimensional molecule crystal nucleus and is still standing, and the organic semiconductor two-dimensional molecule crystal materials are obtained on the water surface. The application of the organic semiconductor two-dimensional molecule crystal materials in the preparation field effect transistor device also belongs to the protection range of the invention. The water surface and a seed crystal formed on the water surface in advance are taken as a growth core, the solution is subjected to self assembly, a large-scale two-dimensional molecule crystal structure is grew up on the water surface, and the field effect transistor prepared by the two-dimensional molecule crystal structure has high carrier mobility and low threshold voltage.
Owner:INST OF CHEM CHINESE ACAD OF SCI

Preparation method of monocrystal diamond film

The invention provides a preparation method of a monocrystal diamond film. The preparation method comprises the following steps: obtaining a diamond substrate and a heterogeneous substrate, carrying out He ion implantation on the surface of the diamond substrate, so that implanted ions are gathered at the corresponding depth of the diamond substrate to form a defect layer, and the diamond film onthe defect layer in the diamond substrate is used as a substrate for homoepitaxy, growing a layer of single crystal diamond film on the diamond film by adopting homoepitaxy, bonding the single crystaldiamond film with the heterogeneous substrate to form a bonding structure, performing wet etching or electrochemical etching on the bonding structure, removing the defect layer, and transferring thediamond film to the surface of the heterogeneous substrate, and if the bonding structure is subjected to electrochemical corrosion, carrying out high-temperature annealing on the diamond substrate subjected to homoepitaxy before the step of bonding the diamond film subjected to epitaxy with the heterogeneous substrate, so that the defect layer is graphitized to form a graphitized defect layer, wherein the implantation energy and implantation dose of the He ions are set in a gradient manner according to a defect layer dissolution method.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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