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Gas flow measurement method, device and control system, and gas mass flowmeter

A gas flow and flow technology, which is applied in the measurement device, liquid/fluid solid measurement, measurement capacity, etc., can solve the problems of large measurement error and slow response time of thermal gas mass flowmeter, so as to improve the test accuracy and ensure long-term Accuracy, improve work efficiency

Active Publication Date: 2021-03-16
BEIJING SEVENSTAR FLOW CO LTD
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  • Claims
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Problems solved by technology

However, because the thermal MFM relies on heat transfer to measure the flow rate, the response time of the thermal gas mass flowmeter is relatively slow, usually within 1 to 10 seconds. large measurement error

Method used

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  • Gas flow measurement method, device and control system, and gas mass flowmeter
  • Gas flow measurement method, device and control system, and gas mass flowmeter
  • Gas flow measurement method, device and control system, and gas mass flowmeter

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Embodiment Construction

[0031] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0032] At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship.

[0033] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0034] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the descript...

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Abstract

The invention discloses a method and a device for measuring gas flow, a control system, a gas mass flow meter and a storage medium, which comprise the following steps of: acquiring first flow data collected by a MEMS sensor and second flow data collected by a thermal flow sensor. If the changing stats are a slow change state, determining the data of the current gas flow rate based on the second flow rate data; if the change state is a fast change state, obtaining the data of the current gas flow rate based on the first flow rate data and the conversion coefficient function. The conversion coefficient function is corrected based on the first flow rate data and the second flow rate data. According to the invention, the gas flow measurement method, device, control system, gas mass flow meterand the storage medium can fully utilize the advantage of quick response of the MEMS sensor; ensure the long-term accuracy, the linearity, the repeatability and the special gas applicability of the product, and the data will not mutate during correction; and improve the accuracy of the flow measurement.

Description

technical field [0001] The invention relates to the technical field of flow detection, in particular to a gas flow measurement method, device, control system, gas mass flow meter, and storage medium. Background technique [0002] Various fluids such as air, water and gas are closely related to people's daily life and social activities. When using various fluids, it is necessary to measure the properties and quantities of these fluids. Thermal gas mass flowmeter (thermal gas mass flowmeter, referred to as thermal MFM) is used to precisely measure the mass flow of gas, and is widely used in semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine, environmental protection and vacuum, etc. It has important applications in scientific research and production in the field. However, because the thermal MFM relies on heat transfer to measure the flow rate, the response time of the thermal gas mass flowmeter is relatively slow, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F15/00
CPCG01F15/00
Inventor 赵迪郑文宁王瑞
Owner BEIJING SEVENSTAR FLOW CO LTD
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