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Concentration measuring device

A technology of concentration measurement and measurement unit, which is applied in the direction of measuring device, transmittance measurement, color/spectral characteristic measurement, etc., which can solve the problem of increasing the size of the concentration measurement device and achieve the effect of easy maintenance

Inactive Publication Date: 2019-03-15
UNIVERSITY OF TOKUSHIMA +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, in the structure in which the optical fiber for light incidence and the optical fiber for light detection are separately attached to both ends of the measurement unit, the overall size of the concentration measurement device often becomes large.

Method used

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  • Concentration measuring device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0060] figure 1 It is a schematic diagram showing the overall configuration of the concentration measurement device 100 according to Embodiment 1 of the present invention. The concentration measurement device 100 is equipped with: a measurement unit 4 having an inflow port 4a, an outflow port 4b, and a flow path 4c of the fluid to be measured, and a light-transmissive window 3 connected to the flow path 4c; A light source 1 for light incident into the measurement unit 4 through the window 3; a reflection member 5 configured to reflect the light propagating in the measurement unit 4 and to emit the reflected light from the measurement unit 4 through the window 3; A measuring photodetector 7 that reflects the light reflected by the reflecting member 5 and emitted from the measuring unit 4; a calculation unit 8 that calculates the concentration of the fluid to be measured based on the detection signal of the measuring photodetector 7; a reference light detector that detects the r...

Embodiment approach 2

[0095] Below, see Figure 5 (a) and (b), the concentration measuring device 200 according to Embodiment 2 will be described.

[0096] The concentration measurement device 200 of the present embodiment differs from the concentration measurement device 100 of the first embodiment in terms of the configuration of the optical device. Other than that, since the configuration of the measurement unit 4 and the like is the same as that of Embodiment 1, the same reference numerals are attached and detailed description thereof will be omitted.

[0097] In optical equipment included in the concentration measurement device 200 , an optical fiber bundle 40 configured by bundling a plurality of optical fibers is used for connecting the light source 1 , the measurement photodetector 7 , and the measurement unit 4 . The optical fiber bundle 40 includes at least one optical fiber 40a for emitting light and at least one optical fiber 40b for receiving reflected light.

[0098] In this embodim...

Embodiment approach 3

[0102] Below, see Image 6 , the concentration measuring device 300 according to Embodiment 3 will be described. The same reference numerals are assigned to the same constituent elements as those in Embodiment 1, and detailed description thereof will be omitted.

[0103] The concentration measuring device 300 of the present embodiment is different from the concentration measuring device 100 of the first embodiment in that a reflective member 60 composed of a prism or the like is used, and the incident light and the reflected light pass through different optical paths parallel to each other in the measuring unit 4. constitute. Furthermore, although a structure for performing concentration measurement using light reflected by a prism is disclosed in, for example, Patent Document 3, the concentration measuring device disclosed in Patent Document 3 is not an in-line concentration measuring device like this embodiment.

[0104] Such as Image 6 As shown, in the measurement unit ...

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Abstract

A concentration measuring device (100) is provided with a measuring cell (4) including a flow passage (4c) for a fluid to be measured, and a translucent window portion (3) adjoining the flow passage;a light source (1) for emitting light which enters the measuring cell via the window portion; a reflective member (5) which reflects light that has propagated through the measuring cell and causes thereflected light to exit the measuring cell via the window portion; a light detector (7) which detects the light that has exited the window portion of the measuring cell; a computing unit (8) which computes the concentration of the fluid to be measured on the basis of a detection signal from the light detector; and an optical instrument (10) which guides the light emitted from the light source tothe window portion of the measuring cell, and guides the light that has exited the window portion of the measuring cell to the light detector.

Description

technical field [0001] The present invention relates to a concentration measuring device, in particular, to a concentration measuring device for measuring the concentration of the fluid to be measured by making light incident on a measurement unit into which the fluid to be measured is introduced, and detecting the passing light of the fluid to be measured emitted from the measurement unit. Measuring device. Background technique [0002] Conventionally, there has been known a concentration measuring device (so-called in-line concentration measuring device) configured in such a way that it is incorporated into a device for supplying a raw material gas such as a gas formed of a liquid material such as an organometallic (MO) or a solid material to a semiconductor manufacturing device. The gas supply line measures the concentration of the gas flowing through the gas supply line. [0003] In such a concentration measuring device, light of a predetermined wavelength enters a meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/33G01N21/05
CPCG01N21/031G01N21/05G01N21/33G01N2021/052G01N21/0303G01N21/59
Inventor 出口祥启府川隆服部大辉永濑正明田中一辉西野功二池田信一
Owner UNIVERSITY OF TOKUSHIMA