A method of dispatching workers for a testing machine

Abstract

The invention provides a detection machine dispatching method, which relates to the technical field of defect detection methods in the integrated circuit manufacturing process. Counting the number of batches accumulated in the detection site; if the number of batches exceeds a preset upper limit, set a priority queue according to a preset rule, and sequentially send all batches according to the priority queue The wafers are sent to the inspection machine in batches for defect detection; if the number of batches is lower than the upper limit, the wafers are sent to the inspection machine in batches according to the above waiting queue. In-machine defect detection. The beneficial effects of the present invention are: real-time monitoring and intelligent adjustment of the machine can be carried out through the method of the present invention, thereby rationally allocating production capacity and effectively reducing monitoring risks.

Description

technical field [0001] The invention relates to the field of defect detection methods in the integrated circuit manufacturing process, in particular to a method for assigning workers to detection machines. Background technique [0002] With the development of integrated circuit manufacturing technology, the process integration is getting higher and higher, and the tolerance of products to defects is decreasing. In order to ensure the product yield, the number of defects in the production process must be strictly controlled. Therefore, the defects on the production line Inspection is an essential part of the integrated circuit manufacturing process. One of the key points of defect detection is to have timeliness. The existing defect detection method is to use the end of the batch number of the product to carry out sample sampling to ensure timeliness. However, in the actual production process, there will be situations where batches arrive at the inspection site in a concentr...

AI Technical Summary

Problems solved by technology

However, in the actual production process, there will be situations where batches arrive at the inspection site in a concentrated manner or the inspection machine is down. The inspection machine cannot complete the inspection of the waiting batches within the effective time, and the production capacity of some process machines is very high. Batch waiting for too long or jumping stations will cause higher risks to the monitoring of process machines

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