Method for suppressing nonlinear effects of nested ring vibrating gyroscope

Abstract

The present invention discloses a method for suppressing nonlinear effects of a nested ring vibrating gyroscope. The implementation steps comprise: selecting a set of driving electrodes and a set of detecting electrodes, wherein the driving electrodes are arranged in the holes near anchor points inside a nested ring gyroscope resonant structure, the detecting electrodes are arranged outside the nested ring gyroscope resonance structure, and both the driving electrode and the detecting electrode respectively contain four arc electrodes which are circumferentially distributed at an angle of 90 degrees; applying the driving AC signal, the DC bias voltage and the high frequency carrier of the first frequency on the selected driving electrodes, applying the high frequency carrier of the secondfrequency, the feedback AC signal and the DC bias voltage on the selected detecting electrodes, and allowing the vibration displacement of the detecting axis to be zero by applying the force on the electrodes through the detecting axis; and outputting the feedback AC signal output on the selected detecting electrodes. According to the electrode configuration method proposed by the present invention, the driving displacement can be greatly increased, and the vibration nonlinearity can be well controlled, so that the performance of the gyroscope can be greatly improved.

Description

technical field [0001] The invention relates to a gyroscope, in particular to a method for suppressing the nonlinear effect of a nested ring vibrating gyroscope through a new electrode configuration scheme. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It plays a very important role in high-end industrial equipment and precision strike weapons such as aerospace, intelligent robots, and guided munitions. Value. The nested ring vibratory gyroscope adopts mature planar micromachining technology, which has great advantages in manufacturability and cost. It makes full use of the structural area, significantly increases the inertial mass, the number of electrodes and the figure of merit, making it possible for high sensitivity and precision. [0003] The nested ring vibrating gyrosc...

AI Technical Summary

Problems solved by technology

[0011] However, since the micro-electromechanical nested ring vibrating gyroscope generally has a small structure size, and through the use of capacitive drive and detection methods, a serious electrostatic nonlinear effect will be generated to achieve a large vibration amplitude, resulting in frequency noise and phase noise of the gyroscope. increase

At the same time, when the displacement is large, the capacitance change is no longer linear with the displacement, which will lead to capacitance nonlinearity in the system, and serious capacitance nonlinearity will affect the control system of the gyroscope and cause control failure.

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