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Debugging method and debugging machine for coating equipment

A technology of coating equipment and debugging method, which is applied in the testing of machine/structural components, sputtering coating, vacuum evaporation coating, etc., and can solve problems such as unqualified products, waste of materials, and non-compliance with preset requirements.

Active Publication Date: 2021-04-02
HKC CORP LTD
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Problems solved by technology

[0003] In the process of coating, due to the relatively high requirements of coating technology and film-forming environment, such as film thickness requirements, etc., after the coating equipment is restarted or the product specifications and coating environment change, it is easy to appear that the coating does not meet the preset requirements. , resulting in unqualified products and waste of materials

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  • Debugging method and debugging machine for coating equipment
  • Debugging method and debugging machine for coating equipment
  • Debugging method and debugging machine for coating equipment

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Embodiment Construction

[0055] It should be understood that the terminology and specific structural and functional details disclosed herein are representative only for describing specific embodiments, but the application can be embodied in many alternative forms and should not be construed as merely Be limited by the examples set forth herein.

[0056] In the description of the present application, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating relative importance, or implicitly indicating the quantity of indicated technical features. Therefore, unless otherwise specified, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features; "plurality" means two or more. The term "comprising" and any variations thereof mean non-exclusive inclusion, possible presence or addition of one or more other features, integers, steps, operations, units, components and / or combinations thereof.

[0057] Al...

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Abstract

A debugging method for a coating apparatus. The method comprises the steps: preparing a plain glass for test (A); coating said plain glass (B); detecting said coated plain glass, and if a standard is satisfied, determining that the coating apparatus is successfully debugged (C); and if the standard is not satisfied, determining that the coating apparatus fails to be debugged, and executing a step of drawing the film from said coated plain glass (D), and re-executing the step of coating said plain glass (B). A debugging machine (100) for the coating apparatus (200) comprises: a detection device (110), detecting said plain glass coated by the coating apparatus (200); a determining device (120), obtaining the detection result of the detection device (110), and determining the detection result according to a preset standard; and a film drawing device (130), performing film drawing on said plain glass which is determined not to satisfy the preset standard by the determining device. The film drawing device (130) sends said plain glass subjected to film drawing to the coating apparatus (200) for re-coating. By means of continuous detection, the coating apparatus is debugged to obtain optimal parameters for mass production of a product, thereby improving production efficiency.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a debugging method and a debugging machine for coating equipment. Background technique [0002] With the development of display technology, people's demand for display panels is increasing. In the production process of the display panel, it is necessary to coat plain glass through coating equipment, such as vacuum ion coating equipment (Physical Vapor Deposition, PVD). display panel. [0003] In the process of coating, due to the relatively high requirements of coating technology and film-forming environment, such as film thickness requirements, etc., after the coating equipment is restarted or the product specifications and coating environment change, it is easy to appear that the coating does not meet the preset requirements. , resulting in unqualified products and waste of materials. Contents of the invention [0004] The object of the present invention is to provide a c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M99/00C23C14/32
CPCC23C14/32G01M99/008
Inventor 潘柏松
Owner HKC CORP LTD
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