A method for monitoring gas species and concentration using an array gas sensor
A gas sensor and gas sensing technology, used in instruments, measuring devices, scientific instruments, etc., can solve the problem of inability to detect gas types and concentrations in real time, and achieve the effects of reducing test costs, improving detection speed, and wide application range.
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[0041] The array gas sensor in the embodiment of the present invention may be composed of a plurality of gas sensing elements arranged in an array, and the plurality of gas sensing elements include multifunctional sensing elements that respond to various gases, The gas has a plurality of single sensing elements responsive, each single sensing element has a different response value at different concentration values of the corresponding gas. The sensitivity of a single sensing element is greater than that of a multi-functional sensing element. Each gas sensing unit can be a separate gas sensor, that is, each gas sensor has a substrate. The array gas sensor is preferably a microstructure, that is, a plurality of gas sensing elements constituting the array gas sensor share a substrate, the gas sensing element may include a sensitive layer and an electrode, the sensitive layer is formed on the shared substrate, and the electrode consists of a sensitive layer lead out. For the s...
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