Deposition device and atomic layer deposition equipment
A deposition device and deposition body technology, applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of cross-contamination, incomplete coating of ALD deposition particles, etc., and achieve the effect of solving cross-contamination
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[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts all fall within the protection scope of the present invention.
[0028] figure 1 As an embodiment of the present invention, this embodiment provides a deposition device, the deposition device includes:
[0029] A reaction unit, comprising a shell 1 with a hollow structure, the hollow structure forms a reaction chamber 11 for depositing the object to be deposited;
[0030] The supply unit 2 communicates with the reaction chamber 11, and the supply unit 2 includes a reactant delivery module 21;
[0031] Wherein, the reactant...
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