Automatic polishing machine with quartz furnace tube and polishing method

Abstract

The invention relates to an automatic polishing machine with a quartz furnace tube. The polishing machine is provided with the quartz furnace tube, a machine table, a first guide rail, a second guiderail, an internal flame gun rack, an external flame gun rack and a rotary table, wherein the machine table is the base of the whole polishing machine; the first guide rail is installed on the upper surface of the machine table; the second guide rail is installed on the side surface of the machine table; the internal flame gun rack is used for installing an internal flame gun installed on the firstguide rail through a sliding block and positioned on the axis of the quartz furnace tube, so that the internal flame gun can move along the first guide rail to carry out flame polishing on the innersurface of the quartz furnace tube; the external flame gun rack is used for installing an external flame gun, and the external flame gun rack is installed on the second guide rail through the slidingblock, so that the external flame gun can move along the second guide rail to carry out flame polishing on the outer surface of the quartz furnace tube; the quartz furnace tube is clamped by the fixture of the rotary table, and meanwhile, the quartz furnace tube performs axial rotary motion under the drive of a rotary table motor.

Description

technical field

[0001] The invention belongs to the technical field of semiconductor processing, and in particular relates to an automatic polishing machine for a quartz furnace tube and a polishing method. Background technique

[0002] In the process of silicon wafer diffusion for integrated circuit silicon wafers larger than 8 inches, a quartz furnace tube is required as a reaction chamber as a reaction environment. And the existing processing technology is to carry out flame polishing treatment to the inner and outer surfaces of the quartz furnace tube with hydrogen-oxygen flame by two workers at the same time, so as to reach the requirement of smoothness of the inner and outer surfaces. This process requires two workers to cooperate with each other with flame polishing guns to polish the inner and outer surfaces of the quartz furnace tube. Large, it is difficult to ensure the consistency of product processing. Contents of the invention

[0003] An embodiment of the i...

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