Micro air compressor

Abstract

The invention belongs to the field of microfluid conveying and control, and particularly relates to a micro air compressor. An upper cover is mounted on a box body. Upper inlet and outlet valves and lower inlet and outlet valves are formed by upper and lower inlet and outlet cavities and one-way valves mounted in the upper and lower inlet and outlet cavities. A left boss of the upper cover is arranged in a left cavity of the box body and enables an upper inflow hole and a lower inflow hole to be communicated. A right boss of the upper cover is arranged in a right cavity of the box body and enables the upper and lower outlet cavities and a gas storage chamber to be communicated. A table of the upper cover enables a driver to be in press joint in a cavity of the box body through a sealing ring, and the driver is formed by bonding a substrate and a piezoelectric plate. Upper compression cavities are formed by the driver, the upper cover, the upper inlet valve and the sealing ring, and theupper compression cavities are connected in series to form an upper compression unit. Lower compression cavities are formed by the driver, the box body, the lower inlet valve and the sealing ring, and the lower compression cavities are connected in series to form a lower compression unit. The upper compression unit and the lower compression unit are connected in parallel. The radii of the upper compression unit and the lower compression unit which are opposite up and down are equal, the cavity radii of the upper compression cavities and the lower compression cavities are gradually reduced from left to right, and the deformation directions of two drivers adjacent left and right in work are opposite.

Description

technical field [0001] The invention belongs to the field of trace gas transmission and control, in particular to a miniature air compressor. Background technique [0002] Micro gas compression and delivery devices are also known as micro air compressors, air pumps, gas compression devices, etc., and are mainly used for gas sampling, gas circulation and supply, jet cooling, negative pressure maintenance, air boosting, oxygenation and many other aspects. According to the working principle, commonly used gas compression devices can be divided into diaphragm type, electromagnetic type, impeller type, piston type, etc., and their common characteristics are that they all include mechanical transmission parts, so the structure is complex, the volume, weight and power consumption are large, and there are The large noise and electromagnetic interference are not convenient for the miniaturization and integration of the structure, and the application in the field of micro-electromecha...

AI Technical Summary

Problems solved by technology

Although the structure, principle and performance of the above-mentioned gas compression and delivery devices are quite different, they all use the bending deformation of the wafer-type piezoelectric vibrator under the action of an electric field to realize the gas drive, and the volume change of the compression chamber caused by the bending deformation of the piezoelectric vibrator The volume is relatively small, and the output flow and pressure that can be realized by the existing piezoelectric gas compression device are still very low, especially the large output flow and high output pressure cannot be obtained at the same time, so the popularization and application are restricted to a certain extent

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