Piezoelectric thin film sensor and preparation method thereof

A piezoelectric thin film and sensor technology, applied in the field of sensors, can solve the problems of high polarization cost of piezoelectric thin film sensors, achieve the effects of saving polarization cost, realizing sensitive response, and ensuring accuracy

Pending Publication Date: 2019-06-11
SHENZHEN HORN AUDIO
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoelectric film sensor and its preparation method, aiming to solve the technical problem of high polarization cost of the piezoelectric film sensor in the prior art

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  • Piezoelectric thin film sensor and preparation method thereof

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Embodiment Construction

[0029] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. Attached below by reference figure 1 The described embodiments are exemplary and are intended to explain the present invention, but should not be construed as limiting the present invention.

[0030] In describing the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or el...

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Abstract

The invention belongs to the technical field of sensors and particularly relates to a piezoelectric thin film sensor and a preparation method thereof. The preparation method comprises the following steps: S1: providing a PET film and carrying out punching processing; S2: dividing the front surface of the PET film into a conductive area and an insulating area, printing a silver paste circuit on theconductive area, and printing insulating oil on the insulating area; S3: printing a shielding material on the back surface of the PET film; S4: coating a conductive adhesive on the silver paste circuit; S5, providing an FPC circuit board, and pasting and fixing the FPC circuit board to the PET film; S6: printing glue on the joint of the FPC circuit board and the PET film and drying; S7: providinga piezoelectric film, and pasting and fixing the two sides of the piezoelectric film to the PET film; S8: cutting the piezoelectric film and the PET film; S9: carrying out fixed-point polarization onthe piezoelectric film; and S10: overturning and folding the piezoelectric film and the PET film. The piezoelectric film is subjected to fixed-point polarization, so that the polarization cost of thepiezoelectric film is remarkably reduced.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a piezoelectric film sensor and a preparation method thereof. Background technique [0002] As a kind of dynamic strain sensor, the piezoelectric thin film sensor is suitable for implanting on the surface of human skin or inside the human body and can monitor vital signs, so it has always been a research hotspot that the industry has been paying close attention to. [0003] At present, the method for preparing a piezoelectric film sensor in the prior art is mainly to uniformly polarize the entire piezoelectric film, so that the piezoelectric film sensor has a piezoelectric function. However, in this way, the polarization treatment will be performed on the part of the piezoelectric film sensor that does not need to be polarized, which cannot save the cost of polarization of the piezoelectric film sensor, resulting in a waste of resources. Contents of the invention [0004] The ...

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Application Information

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IPC IPC(8): H01L41/257H01L41/29H01L23/552H01L41/047H01L41/053H01L41/08H01L41/113
CPCY02P70/50
Inventor 陈雄朱彪梁海郑洁刘涛王丽
Owner SHENZHEN HORN AUDIO
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