Transmission type MEMS chip, split transmission type chip, illumination system and automobile
A lighting system and transmissive technology, which are applied in the fields of split transmissive chips, automobiles, lighting systems, and transmissive MEMS chips, can solve the problem of inability to directly illuminate the MEMS micro light-blocking sheet array.
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Embodiment 2
[0071] In this embodiment, the driving device includes a heating device, and the MEMS micro light-shielding sheet includes an upper layer and a lower layer, wherein the materials of the upper layer and the lower layer have different coefficients of thermal expansion. Other parts are the same as the first embodiment of the transmissive MEMS chip.
[0072] In this embodiment, the driving mode of the driving device is temperature. In practical application, when the heating device heats the materials of the upper layer and the lower layer, since the materials of the upper layer and the lower layer are different, after electrification, it deflects to the side with a smaller expansion coefficient, thereby realizing the bending deformation of the mirror surface of the MEMS micro light blocking sheet. And by controlling the temperature, the bending effect of different MEMS micro-light-blocking mirrors can be realized, so the amount of bending deformation of the MEMS micro-light-blocki...
Embodiment 3
[0074] In this embodiment, the driving device includes an electromagnet, the MEMS micro light-blocking sheet includes an elastic bending piece, and a magnet is fixed on the top of the bending piece. Other parts are the same as the first embodiment of the transmissive MEMS chip.
[0075] In this embodiment, the driving method of the driving device is magnetic force. In actual application, the electromagnet generates electromagnetic force after being energized, which is magnetic, and the magnet on the top of the bending piece is attracted, driving the top of the bending piece to move, causing the bending piece to bend and deform. After the electromagnet is powered off, the magnetism disappears. The bent piece can return to its original shape due to its own elasticity. And by controlling the magnetic force, the bending effect of different MEMS micro light blocking sheet mirrors can be realized, so the amount of bending deformation of the MEMS micro light blocking sheet can be fr...
Embodiment 1
[0077] See figure 1 , figure 2 , image 3 , Figure 4 , a split transmissive chip, comprising the transmissive MEMS chip of any one of the above embodiments,
[0078] In the MEMS micro light barrier array 3, each MEMS micro light barrier has a fixed end and a free end, the fixed end is fixed on the support frame 1, and the free end can form a curved end 4 after the MEMS micro light barrier is bent by the driving device ;
[0079] The two rows of MEMS micro light blocking sheets are respectively the first row of MEMS micro light blocking sheets 311 and the second row of MEMS micro light blocking sheets 312;
[0080] The free end of the first row of MEMS micro-light-blocking sheets 311 is arranged near the second row of MEMS micro-light-blocking sheets 312, and the free end of the second row of MEMS micro-light-blocking sheets 312 is arranged near the first row of MEMS micro-light-blocking sheets 311;
[0081] The first row of MEMS micro-light-blocking sheets 311 and the s...
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