Structure light micro-nano structure three-dimensional detection method based on composite grating
A compound grating and three-dimensional detection technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as low efficiency and complex structure, achieve simple system structure, realize continuous measurement, and have good application prospects
A compound grating and three-dimensional detection technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as low efficiency and complex structure, achieve simple system structure, realize continuous measurement, and have good application prospects
CN109916331AActive Publication Date: 2019-06-21INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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[0016] The present invention will be further described in detail below in conjunction with the accompanying drawings and working principle.
[0017] Such as figure 1 As shown, the structured light micro-nano structure three-dimensional detection device based on a composite grating includes a CCD camera 1, a first tube lens 2, a white light source 3, a condenser lens 4, a first sinusoidal transmission grating 5, and a second sinusoidal transmission grating 6 , a second tube lens 7, a dichroic prism 8, a microscopic objective lens 9, and a PZT horizontal scanning table 11; wherein the light emitted by the white light source 3 passes through the first sinusoidal transmission grating 5, the first sinusoidal transmission grating 5, After the second sinusoidal transmission grating 6 and the second tube lens 7, it is reflected by the dichroic prism 8, and is focused on the surface of the object to be measured 10 placed on the PZT horizontal scanning table 11 through the microscope ob...
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The invention discloses a structure light micro-nano structure three-dimensional detection method based on a composite grating. The composite grating formed by a horizontal sinusoidal grating and a sinusoidal grating inclined at a certain angle theta projects structure light on a surface of a tested object. During a process of horizontal scanning of the object to be tested, CCD synchronously collects modulated fringe image sequences from a conjugate light path through a beam splitting prism. A grating line direction of a horizontal grating is vertical to a horizontal scanning direction, and ahorizontal displacement of an entire field modulation degree of the object is extracted and calcualted to realize high-precision pixel matching of the image sequences. An imaging focal plane positionof an inclined grating is inclined and fixed. During a horizontal scanning process, phase shift and vertical scanning can be realized continuously, automatically and synchronously. The inclined grating is used for single point modulation degree extraction of the object, and height information is acquired to realize high precision micro-nano three-dimensional detection. In the invention, the objectto be tested is horizontally scanned so that a large-range and high-efficient three-dimensional measuring process can be realized, and the method has a good application prospect in the micro-nano detection field.
Description
technical field [0001] The invention belongs to the technical field of optical microscopic imaging and precision detection, and in particular relates to a three-dimensional detection method for structured light micro-nano structures based on composite gratings. Background technique [0002] Micro-nano devices refer to functional devices with a scale of micron and nanometer. The application in the technical fields of microelectronics, biotechnology, aerospace, and metamaterials has developed rapidly, which has greatly promoted modern life and social production. It will be a hot spot in the development of science and technology strategy in the next period. The three-dimensional appearance of micro-nano devices is directly related to the performance characteristics, reliability and functional analysis of the product. High-precision and fast micro-nano detection methods and technologies are important means to obtain the three-dimensional appearance of micro-nano structures, and ...
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Patent Timeline
21 Jun 2019
Publication
CN109916331A
- IPC
- G01B11/24
- Inventors
- 位浩杰; 唐燕