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Electrostatic chuck, film forming apparatus, substrate holding and separating method, film forming method and manufacturing method of electronic device

A technology of electrostatic chuck and substrate holding part, which is applied in the direction of ion implantation plating, semiconductor/solid-state device manufacturing, circuit, etc., which can solve the problem of reducing the precision of evaporation, achieve the effect of stabilizing the separation start position and reducing the impact

Active Publication Date: 2019-07-02
CANON TOKKI CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, as the size of the substrate increases, the central part of the substrate that is not supported by the support part of the substrate holder is deflected due to the weight of the substrate, which is the main cause of lowering the deposition accuracy.

Method used

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  • Electrostatic chuck, film forming apparatus, substrate holding and separating method, film forming method and manufacturing method of electronic device
  • Electrostatic chuck, film forming apparatus, substrate holding and separating method, film forming method and manufacturing method of electronic device
  • Electrostatic chuck, film forming apparatus, substrate holding and separating method, film forming method and manufacturing method of electronic device

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Embodiment Construction

[0028] Hereinafter, preferred embodiments and examples of the present invention will be described with reference to the drawings. However, the following embodiments and examples are for illustrative purposes only and show preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations. In addition, the hardware structure and software structure, processing flow, manufacturing conditions, dimensions, materials, shapes, etc. of the devices described below are not intended to limit the scope of the present invention unless otherwise specified.

[0029] The present invention can be suitably applied to an apparatus for forming a patterned thin film (material layer) on the surface of a substrate by vacuum evaporation. As the material of the substrate, any material such as glass, a thin film of a polymer material, or metal can be selected, and as the vapor deposition material, any material such as an organic material or ...

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PUM

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Abstract

The electrostatic chuck according to the present invention includes a substrate holding portion including an electrode portion; a voltage applying portion that applies a voltage to the electrode portion; and a voltage control portion that controls the voltage applied to the electrode portion by the voltage applying portion. The electrostatic chuck includes a plurality of substrate holding portionsthat apply a first voltage for holding the substrate and a second voltage for separating the substrate to the plurality of substrate holding portions. The voltage control portion independently controls the application of the second voltage to the substrate holding portions.

Description

technical field [0001] The present invention relates to a film forming apparatus, and more particularly, to an electrostatic chuck for holding a substrate in the film forming apparatus, and a method for holding and separating a substrate to the electrostatic chuck. Background technique [0002] Recently, an organic EL display device has attracted attention as a flat panel display device. Organic EL display devices are self-luminous displays, and their response speed, viewing angle, and thinner characteristics are superior to those of liquid crystal panel displays. LCD panel monitor. In addition, its application fields are also expanding in automotive displays and the like. [0003] An element of an organic EL display device has a basic structure in which an organic substance layer that causes light emission is formed between two opposing electrodes (a cathode electrode and an anode electrode). The organic material layer and the electrode layer of the organic EL display de...

Claims

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Application Information

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IPC IPC(8): C23C14/50C23C14/24H01L51/56
CPCC23C14/50C23C14/24H10K71/00H01L21/6833H01L21/02631H10K71/16
Inventor 柏仓一史石井博细谷映之
Owner CANON TOKKI CORP