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Measuring device and measuring method for key parameters of light spot

A key parameter and measurement device technology, applied in the field of optical measurement, to achieve the effect of improving accuracy

Inactive Publication Date: 2019-07-02
深圳市计量质量检测研究院(国家高新技术计量站国家数字电子产品质量监督检验中心)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the above technical problems, the present invention discloses a measuring device and method for key parameters of light spots, which uses a line array image sensor to realize rapid measurement of relevant parameters through fast line scanning; especially solves the problem of key parameters of large-size spots. measurement problem

Method used

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  • Measuring device and measuring method for key parameters of light spot
  • Measuring device and measuring method for key parameters of light spot
  • Measuring device and measuring method for key parameters of light spot

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] like figure 1 As shown, a measuring device for the key parameters of the light spot includes a displacement stage 1 and a one-dimensional linear vibration optical sensor 2 located on the displacement stage 1. The Z-direction displacement member 12, the X-direction displacement member 11 is connected to the Z-direction displacement member 12, the displacement stage 1 drives the one-dimensional line vibration optical sensor 2 to move along the X and / or Z directions, and the one-dimensional line vibration optical sensor 2 moves along the X and / or Z directions. The line vibration direction of the sensor 2 is perpendicular to the moving directions of the X-direction displacement member 11 and the Z-direction displacement member 12 . Wherein, the one-dimensional line vibration optical sensor 2 is a one-dimensional line vibration CCD, a CMOS optical sensor, or a one-dimensional line vibration optical sensor formed of materials extending to infrared wavelengths. In this embodi...

Embodiment 2

[0036] On the basis of Example 1, such as figure 2 As shown, the X-direction drive mechanism 13 is located above the Z-direction drive mechanism 15; the Z-direction displacement member 12 includes a Z-direction drive mechanism 15 and a Z-direction displacement slider 16, and the X-direction displacement member 11 includes an X-direction displacement member 15. The driving mechanism 13 and the X-direction displacement slider 14, the X-direction driving mechanism 13 is connected with the Z-direction displacement slider 16,

[0037] The one-dimensional linear vibration optical sensor 2 is located on the X-direction displacement slider 14 .

[0038] Wherein, the Z-direction driving mechanism 15 and the X-direction driving mechanism 13 are screw drive mechanisms, rack drive mechanisms or track drive mechanisms. The screw driving mechanism adopted in this embodiment is to drive the screw through the motor, so as to drive the slider to move along the slide rail.

Embodiment 3

[0040] On the basis of Example 1, such as image 3 As shown, the Z-direction drive mechanism 15 is located above the X-direction drive mechanism; the X-direction displacement member 11 includes an X-direction drive mechanism 13 and an X-direction displacement slider 14, and the Z-direction displacement member 12 includes a Z-direction drive The mechanism 15 and the Z-direction displacement slider 16 , the Z-direction driving mechanism 15 is connected to the X-direction displacement slider 14 , and the one-dimensional line vibration optical sensor 2 is located on the Z-direction displacement slider 16 .

[0041] Wherein, the Z-direction driving mechanism 15 and the X-direction driving mechanism 13 are screw drive mechanisms, rack drive mechanisms or track drive mechanisms. The screw driving mechanism adopted in this embodiment is to drive the screw through the motor, so as to drive the slider to move along the slide rail.

[0042] Further, the X-direction displacement member 11 ...

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Abstract

The invention provides a measuring device and a measuring method for key parameters of a light spot. The light spot key parameter measuring device comprises a displacement stage and a one-dimensionallinear array optical sensor on the displacement stage. The displacement stage comprises an X-direction displacement member and a Z-direction displacement member, wherein the X-direction displacement member and the Z-direction displacement member share the same light propagation direction and are connected. The displacement stage drives the one-dimensional linear array optical sensor to move in theX and / or Z direction. The line vibration direction of the one-dimensional linear array optical sensor is perpendicular to the moving direction of the X-direction displacement member. According to thetechnical scheme of the invention, the linear array optical sensor is combined with the displacement stage; a large-sized light spot at a specific position is measured through fast line scanning; thecenter position and the size of the light spot in the scanning dimension direction can be accurately acquired; and the device and the method are not limited by the size of the light spot at a detection position.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to a measuring device and a measuring method for key parameters of light spots. Background technique [0002] Because the processing technology limits the size of the optical CCD / CMOS sensor, the detection bin of the traditional spot analyzer is generally below 15 mm. With the development of laser technology and the expansion of application fields, the measurement requirements for large-size spot have exceeded the scope of application of traditional spot analyzers. [0003] In the process of metrology and testing, the instrument sent by the customer for inspection uses a special light source, requiring the measurement of a laser spot of a special size and shape. Due to the limitation of the size of the photosensitive surface, the existing measuring instruments on the market and in the laboratory can no longer meet the special measurement requirements for the...

Claims

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Application Information

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IPC IPC(8): G01M11/02
CPCG01M11/0207
Inventor 侯国辉李向召黄志凡李名兆杜岚郑欢欢
Owner 深圳市计量质量检测研究院(国家高新技术计量站国家数字电子产品质量监督检验中心)