Measuring device and measuring method for key parameters of light spot
A key parameter and measurement device technology, applied in the field of optical measurement, to achieve the effect of improving accuracy
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Embodiment 1
[0033] like figure 1 As shown, a measuring device for the key parameters of the light spot includes a displacement stage 1 and a one-dimensional linear vibration optical sensor 2 located on the displacement stage 1. The Z-direction displacement member 12, the X-direction displacement member 11 is connected to the Z-direction displacement member 12, the displacement stage 1 drives the one-dimensional line vibration optical sensor 2 to move along the X and / or Z directions, and the one-dimensional line vibration optical sensor 2 moves along the X and / or Z directions. The line vibration direction of the sensor 2 is perpendicular to the moving directions of the X-direction displacement member 11 and the Z-direction displacement member 12 . Wherein, the one-dimensional line vibration optical sensor 2 is a one-dimensional line vibration CCD, a CMOS optical sensor, or a one-dimensional line vibration optical sensor formed of materials extending to infrared wavelengths. In this embodi...
Embodiment 2
[0036] On the basis of Example 1, such as figure 2 As shown, the X-direction drive mechanism 13 is located above the Z-direction drive mechanism 15; the Z-direction displacement member 12 includes a Z-direction drive mechanism 15 and a Z-direction displacement slider 16, and the X-direction displacement member 11 includes an X-direction displacement member 15. The driving mechanism 13 and the X-direction displacement slider 14, the X-direction driving mechanism 13 is connected with the Z-direction displacement slider 16,
[0037] The one-dimensional linear vibration optical sensor 2 is located on the X-direction displacement slider 14 .
[0038] Wherein, the Z-direction driving mechanism 15 and the X-direction driving mechanism 13 are screw drive mechanisms, rack drive mechanisms or track drive mechanisms. The screw driving mechanism adopted in this embodiment is to drive the screw through the motor, so as to drive the slider to move along the slide rail.
Embodiment 3
[0040] On the basis of Example 1, such as image 3 As shown, the Z-direction drive mechanism 15 is located above the X-direction drive mechanism; the X-direction displacement member 11 includes an X-direction drive mechanism 13 and an X-direction displacement slider 14, and the Z-direction displacement member 12 includes a Z-direction drive The mechanism 15 and the Z-direction displacement slider 16 , the Z-direction driving mechanism 15 is connected to the X-direction displacement slider 14 , and the one-dimensional line vibration optical sensor 2 is located on the Z-direction displacement slider 16 .
[0041] Wherein, the Z-direction driving mechanism 15 and the X-direction driving mechanism 13 are screw drive mechanisms, rack drive mechanisms or track drive mechanisms. The screw driving mechanism adopted in this embodiment is to drive the screw through the motor, so as to drive the slider to move along the slide rail.
[0042] Further, the X-direction displacement member 11 ...
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