T-shaped floating element capacitive shear stress microsensor chip

Abstract

The invention relates to a T-shaped floating element capacitive shear stress microsensor chip, which comprises a T-shaped floating element (1), an elastic beam (2), a movable comb tooth (3), a fixed comb tooth (4) and a base (5). The T-shaped floating element capacitive shear stress microsensor chip of the invention greatly simplifies the mechanical model of a microsensor structure and improves the design efficiency. At the same time, the T-shaped floating element covers the elastic beam and the comb tooth structure, which reduces the probability that the comb tooth structure is blocked or adhered, improves the reliability and the continuous and repeatable measurement ability of the microsensor in actual measurement.

Description

technical field [0001] The invention relates to a capacitive shear stress microsensor chip of a T-shaped floating element, which belongs to the technical field of sensors. Background technique [0002] When the fluid flows through the surface of the object, it will produce viscous resistance on the surface of the object due to its viscosity. The viscous resistance acting on the unit area is called shear stress, or shear stress for short. As one of the most basic hydrodynamic parameters, the accurate measurement of shear stress can provide important references for analyzing flow phenomena such as transition, separation, and reattachment in fluid boundary layers, and also provide effective data for verifying computational fluid dynamics models. In addition, shear stress can directly reflect frictional resistance, and its accurate measurement has important reference value for structural optimization design, drag reduction and noise reduction of aircraft and high-speed trains, e...

AI Technical Summary

Problems solved by technology

However, the capacitive shear stress microsensor chip of the floating element is directly exposed to the air flow field, and its floating element, elastic beam and comb teeth will all be subjected to shear stress, resulting in a large amount of calculation when analyzing the mechanical model of the microsensor, which is not conducive to Optimal Design of Microsensor Structure

In addition, the comb tooth structure is easily affected by particulate pollutants and water mist in the measured flow field, which may cause blockage or adhesion of the comb tooth structure, resulting in microsensor failure

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