Locking mechanism for foup box, foup device and locking method of foup box

Abstract

The invention provides a locking mechanism for a foup box, the foup device and a locking method of the foup box. The locking mechanism for the foup box comprises a sliding supporting plate, a slidingblock, a sliding way, a fixing supporting plate, a sliding air cylinder, an air cylinder connecting plate, a telescopic air cylinder and a locking clamping block, wherein the telescopic air cylinder is fixed on the fixing supporting plate, a telescopic air cylinder telescopic rod extends out of the telescopic air cylinder, and the locking clamping block is fixed on the telescopic air cylinder telescopic rod; the sliding way is fixedly installed above the fixing supporting plate, the sliding block is installed on the sliding way, and the sliding block can slide on the sliding way; the sliding supporting plate is fixedly installed on the sliding block, and the sliding supporting plate is used for containing the foup box. According to the locking mechanism, the foup device and the locking method, complete fixation of the foup box can be realized, and preferably, side operation can be carried out on wafers of the foup box, the limitation of an operation position of the foup box is released, reliability is high, structure is reasonable, and adjustment is convenient.

Description

technical field [0001] The invention relates to an automatic mechanical device mainly used in the industrial field, in particular to a locking mechanism for a foup box, a foup device and a locking method thereof. Background technique [0002] There are many procedures or steps in the manufacturing process of semiconductor wafers, and the wafers need to be placed in different locations and in different machines due to these procedures or steps, so the wafers must be transported from one place during the process To another place, it must even be stored for a period of time to match the necessary process. Among them, the wafer carrying device (Cassette) has both storage and transportation functions, and needs to be suitable for various forms of transportation and transmission devices, so it plays an extremely important role in the semiconductor wafer manufacturing process. [0003] In semiconductor manufacturing plants, wafers usually need to be efficiently transported and pos...

AI Technical Summary

Problems solved by technology

The fixing of the Foup box is the foundation of the silicon wafer transmission. The position of the Foup box is fixed mainly by the action of the gravity of the Foup box on the lower support device. This method cannot completely fix the Foup. When operating the side of the Foup box, the Foup box will deviate from the original position. Some fixed positions limit the operating position of the foup box

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