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Double-channel anti-vibration interference measuring device and method

An interferometric measurement and anti-vibration technology, applied in measurement devices, optical devices, instruments, etc., to achieve the effect of solving environmental vibration, low cost, effective and rapid measurement

Active Publication Date: 2019-07-16
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a dual-channel anti-vibration interferometry device and method that overcomes the impact of environmental vibration during interferometry and improves measurement accuracy

Method used

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  • Double-channel anti-vibration interference measuring device and method
  • Double-channel anti-vibration interference measuring device and method
  • Double-channel anti-vibration interference measuring device and method

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Embodiment

[0059] In this embodiment, the laser 1 of the light source part in the dual-channel type anti-vibration interferometry device is a helium-neon laser with an output power of 5mw, and the wavelength is 632.8nm. The effective focal length is 50 mm, the test object 10 is a concave mirror, its radius of curvature is 125 mm, and the clear aperture is 25 mm. The focal lengths of the fifth lens 15 and the sixth objective lens 17 are respectively 150 mm and 75 mm. The third lens 19 and the fourth objective lens 21 The focal lengths are also 150mm and 75mm, the sampling pixels of the second area array detector 22 and the first area array detector 23 are both 1920×1200, and the pixel size is 5.8um.

[0060] Through the above-mentioned device for measurement, a pair of interference fringe images collected by the main interferometry system are as follows: figure 2 As shown, an interference fringe pattern collected by the auxiliary interferometry system 25 is shown as image 3 As shown, a...

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Abstract

The invention discloses a double-channel anti-vibration interference measuring device and a method thereof. The device comprises a light source beam expanding and collimating system which is used forperforming beam expanding and collimating on the light source, an auxiliary interference measuring system for detecting the vibration phase plane of the measured piece, a main interference measurementsystem for measuring the phase distribution of the measured piece by combining with an auxiliary interference measurement system, and an optical path system of the measured piece, which are arrangedin sequence. The light source beam expanding and collimating system and the optical path system of the measured piece have the same optical axis, which is marked as the first optical axis, and the optical axes of the auxiliary interference measurement system and the main interference measurement system are respectively marked as the second optical axis and the third optical axis which are verticalto the first optical axis; the light source beam expanding and collimating system, the main interference measurement system and the optical path system of the measured piece form a main Twyman-Greeninterference light path; and the light source beam expanding and collimating system, the auxiliary interference measurement system and the optical path system of the measured piece form an auxiliary Twyman-Green interference optical path. The device and the method have the advantages of good vibration resistance effect, high measurement precision, simple and compact structure and lower cost.

Description

technical field [0001] The invention belongs to the field of optical interferometric measurement testing, in particular to a dual-channel anti-vibration interferometric measuring device and method. Background technique [0002] Nowadays, optical interferometry technology is widely used to measure the surface shape of optical components. There are various traditional optical interferometry devices and measurement methods, such as Michelson interferometer, Tieman interferometer, Fizeau interferometer and other devices and phase-shifting interferometry. measurement, Fourier transform interferometry, dislocation interferometry and heterodyne interferometry and other measurement techniques. However, these methods have evolved so far, and the requirements for the measurement environment are very strict, especially in the vibration environment, the measured phase cannot be accurately measured. [0003] The existing interference devices and measurement methods with good robustness ...

Claims

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Application Information

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IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02075G01B11/2441
Inventor 李建欣段明亮宗毅陈国梁卢文倩朱日宏陈磊何勇郭仁慧马俊
Owner NANJING UNIV OF SCI & TECH
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