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Step pulse test method of semiconductor device based on LabVIEW

A pulse test, semiconductor technology, applied in the direction of single semiconductor device testing, instruments, measuring electricity, etc., can solve the problems of inability to meet the needs of efficient and accurate experiments, low ease of use, slow speed, etc., to achieve automatic real-time testing, Simple structure to overcome the effect of low usability

Inactive Publication Date: 2019-07-19
JIANGNAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The traditional pulse test method is operated through the instrument panel, which has low usability, slow speed, and low efficiency, and cannot meet the contemporary high-efficiency and precise experimental needs.

Method used

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  • Step pulse test method of semiconductor device based on LabVIEW
  • Step pulse test method of semiconductor device based on LabVIEW
  • Step pulse test method of semiconductor device based on LabVIEW

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Embodiment Construction

[0023] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0024] The embodiment of the present invention provides a semiconductor device step pulse test method based on LabVIEW, which is applied to such as figure 1 As shown in the semiconductor device step pulse test system, the semiconductor device step pulse test system 100 includes: a host computer 11, a Keithley 2461 digital source meter 13, a probe station base 18, a probe 17, a probe cover 16, and a probe magnetic base 15. Microscope 20.

[0025] The upper computer 11 is connected to the Keithley 2461 digital source meter 13 through the USB cable 12 that comes with the Keithley 2461 digital source meter 13, and the Keithley 2461 digital source meter 13 is connected to the probe magnetic base 15 through the BNC line 14, and the probe mag...

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Abstract

The invention discloses a step pulse test method of a semiconductor device based on LabVIEW, and belongs to the field of semiconductor device test. The method is applied to a step pulse test system ofthe semiconductor device, and comprises the following steps: mounting LabVIEW, NI VISA, and LabVIEW-based upper computer software for controlling a Keithley 2461 digital source meter on an upper computer; placing a semiconductor device to be tested on a probe platform base, and connecting a probe with the semiconductor device to be tested; setting all pulse source related parameters and related functions on the upper computer at one time; and triggering an operation button to run the step pulse test system of the semiconductor device, and displaying scanning result data in a data output areaof a software front panel. The instrument operation is simplified, the data analysis is more convenient and effective, and the shortcomings of low usability, low speed and low efficiency of the traditional pulse test are overcome.

Description

technical field [0001] The embodiment of the present invention relates to the field of semiconductor device testing, in particular to a step pulse testing method for semiconductor devices based on LabVIEW. Background technique [0002] When performing parametric tests on semiconductor devices, it is necessary to make the tested device meet the test conditions specified in the parameter test, and also meet the specified test ambient temperature. The power dissipated by the device under test conditions will also cause an additional temperature rise to it. In order to reduce the influence of additional temperature rise, the only way is to shorten the test time. Therefore, pulse test has become an important means to study the performance of semiconductor devices. [0003] Through the pulse test, more semiconductor device information can be obtained, and the behavior characteristics of semiconductor devices can be analyzed and mastered more accurately. For example, the pulse te...

Claims

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Application Information

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IPC IPC(8): G01R31/26
CPCG01R31/2601
Inventor 赵琳娜林露斯罗沁轩闫大为顾晓峰
Owner JIANGNAN UNIV
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