Mechanical arm device and control method of mechanical arm device

A technology of a robot arm and a control method, which is applied in the field of control of a robot arm device and a robot arm device, and can solve problems such as deformation of shelves, change of relative positional relationship, inability to correctly clamp or place wafer carriers, etc.

Inactive Publication Date: 2019-07-23
GALLANT PRECISION MACHINING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in practical applications, due to various environmental factors, such as uneven elevated floors in the factory or slight deformation of shelves, the relative positional relationship between the robotic arm and the wafer carrier or machine equipment may change, resulting in incorrect Pick and place wafer carriers

Method used

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  • Mechanical arm device and control method of mechanical arm device
  • Mechanical arm device and control method of mechanical arm device
  • Mechanical arm device and control method of mechanical arm device

Examples

Experimental program
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Embodiment Construction

[0029] Please also refer to Figure 1 to Figure 3 and Figure 7 , figure 1 It is a schematic diagram showing that the robot arm device 1 of the present invention intends to clamp a wafer carrier C arranged on a production equipment A; Figure 7 It is a schematic diagram showing that the robotic arm device of the present invention intends to hold a wafer carrier F placed on a shelf B; wherein, figure 1 The morphology of the wafer carrier C shown is the same as Figure 7 The wafer carrier F shown has different shapes, but the robotic arm device of the present invention is not limited to only holding the two types of wafer carriers.

[0030] Such as figure 1 , figure 2 As shown, the robot arm device 1 is used to clamp a wafer carrier C, and the robot arm device 1 includes: a robot arm 10, a gripper device 20, an image acquisition module 30, and at least one distance sensing unit 40 and control module 50 (such as image 3 shown). The robot arm 10 can be movably arranged o...

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PUM

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Abstract

The invention relates to a control method of a mechanical arm device for conveying a wafer carrier and the mechanical arm device. The mechanical arm device comprises a mechanical arm, a clamping jaw device, an image acquisition module, a distance sensing unit and a control module, wherein the clamping jaw device comprises two clamping jaw structures and a movable assembly; the two jaw structures are connected with the movable assembly; the control module can control the two jaw structures to be close to each other or away from each other; the image acquisition module is arranged on the clamping jaw device and used for acquiring images of the wafer carrier within a preset range and being capable of generating corresponding image acquisition information; the distance sensing unit is used forsensing a plurality of preset positions of the wafer carrier and correspondingly generating multiple distance sensing information; and the control module can correspondingly control the clamping jawdevice according to the image acquisition information, the multiple distance sensing information and the preset position information in a database, so that the clamping jaw device is capable of picking up and placing the wafer carrier correctly.

Description

technical field [0001] The invention relates to a robot arm device and a control method thereof, in particular to a robot arm device for transporting a wafer carrier and a control method thereof. Background technique [0002] During the wafer manufacturing process, the semi-finished wafers are mostly placed on the wafer carrier, and the wafer carrier is picked and placed by a robot arm. Generally speaking, the robotic arm will pick up the wafer carrier at a predetermined position or place the wafer carrier at a predetermined position according to a predetermined path. However, in practical applications, due to various environmental factors, such as uneven elevated floors in the factory or slight deformation of shelves, the relative positional relationship between the robotic arm and the wafer carrier or machine equipment may change, resulting in incorrect Pick and place wafer carriers in a precise manner. Contents of the invention [0003] The main purpose of the present...

Claims

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Application Information

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IPC IPC(8): B25J9/00B25J13/00B25J13/08B25J15/08B25J19/02B25J19/04B25J9/16
CPCB25J9/00B25J9/1669B25J13/00B25J13/006B25J13/08B25J15/08B25J19/02B25J19/04
Inventor 黄宝锋江家安卓家弘
Owner GALLANT PRECISION MACHINING CO LTD
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