Spectral confocal axial distance detecting method, device and equipment

Abstract

The invention discloses a spectral confocal axial distance detecting method, device and equipment. The method comprises the following steps of driving a spectral confocal probe to axially scan the surface of an object to be detected, comparing reflected spectral signals of each scanning position, obtaining the maximum light intensity that each spectrometer pixel can generate in the measurement range, and grouping the maximum light intensity as a reference light intensity signal; obtaining a noise spectrum signal; and calculating dispersion reflectance spectrums of the respective scanning positions according to the reference light intensity signal, the noise spectrum signal and the reflection spectrum signal. The spectral confocal axial distance detecting method, device and equipment provided by the invention, by obtaining the maximum light intensity which can be generated by each spectrometer pixel in the measurement range as the reference light intensity signal, calculating the dispersion reflectance by the noise spectrum signal and further performing peak finding on the dispersion reflectance as a focus pixel ordinal value, make up the difference in intensity, transmittance and the like of the light of different wavelengths caused by the light source, and can effectively improve the accuracy of solving the focus pixel ordinal value.

Description

technical field [0001] The invention relates to the technical field of spectral confocal displacement measurement, in particular to a spectral confocal axial distance detection method, device and equipment. Background technique [0002] With the rapid development of spectral confocal technology, spectral confocal displacement sensors have been widely used in precision displacement detection and low-frequency vibration monitoring due to their advantages of non-contact, high precision, and fast sensitivity. Spectral confocal displacement detection uses dispersion to distribute different wavelengths in different axial positions. According to the principle of confocal, the peak wavelength of the spectrum reflected from the surface to be measured at a certain position represents the focused wavelength of the position, thus forming a pair of wavelength and position. One encoding method. In fact, the relationship between wavelength and position is generally obtained through the ca...

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Problems solved by technology

However, although these methods take into account the inconsistency of the light source intensity to a certain extent, they ignore the differences in the transmittance of light of different wavelengths in the propagation path and the reflection of the lens surface. There is no comparability between the light and the reflected light passing through the dispersive probe. For example, there are changes in the degree of occlusion and intensity of the small hole. The reference light obtained in this way will inevitably affect the solution accuracy and adaptability of the focusing wavelength.

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