Hot-wall hot wire CVD device for preparing large-area diamond film
A diamond film, large-area technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve the problems of uneven temperature distribution, inability to prepare large areas, etc., and achieve the effect of uniform growth in large areas
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Embodiment 1
[0024] The device structure of hot-wall hot-wire CVD for preparing large-area diamond films is as follows: figure 1 As shown, it includes a closed reaction chamber 1, an insulating wall 2, a front cover of the reaction chamber sealing flange 3, a rear cover of the reaction chamber sealing flange 4, a hot wire holder 5, a sample holder 6, a reaction gas cylinder 13, and a power supply 12. Vacuum pump 11, cooling circulating water machine 14, heating wire 10, heat insulation front baffle 9, heat insulation rear baffle 7 and resistance wire 8. The reaction chamber 1 is a quartz tube, and its front and rear ends are respectively connected with the reaction chamber sealing flange front cover 3 and the reaction chamber sealing flange rear cover 4, and placed in the heat insulating wall 2 constructed of porous alumina. A resistance wire 8 for heating is provided at the interface between the reaction chamber and the insulating wall. Both the reaction chamber sealing flange front cove...
Embodiment 2
[0034] The device structure of hot-wall hot-wire CVD for preparing large-area diamond films is as follows: figure 1As shown, it includes a closed reaction chamber 1, an insulating wall 2, a front cover of the reaction chamber sealing flange 3, a rear cover of the reaction chamber sealing flange 4, a hot wire holder 5, a sample holder 6, a reaction gas cylinder 13, and a power supply 12. Vacuum pump 11, cooling circulating water machine 14, heating wire 10, heat insulation front baffle 9, heat insulation rear baffle 7 and resistance wire 8. The reaction chamber 1 is a quartz tube, and its front and rear ends are respectively connected with the reaction chamber sealing flange front cover 3 and the reaction chamber sealing flange rear cover 4, and placed on the heat insulating wall 2 constructed of alumina fiber heat insulating material. Inside. A resistance wire 8 is provided between the reaction chamber and the insulating wall. Both the reaction chamber sealing flange front c...
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