Asymmetric MZI optical waveguide temperature sensor based on loaded strip-shaped structure and preparation method thereof

A technology of temperature sensor and strip waveguide, which is applied in the field of asymmetric MZI optical waveguide temperature sensor based on loaded strip structure and its preparation, can solve the problems of limiting the practical application of temperature sensor and the inability to realize the temperature monitoring function, etc. Large-scale production, exacerbating the change of output light intensity, and the effect of process compatibility

Inactive Publication Date: 2019-08-02
JILIN UNIV
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Problems solved by technology

However, in practical applications, the two interference arms of MZI are in the same environment at the same time, and the effective refractive index changes of the two

Method used

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  • Asymmetric MZI optical waveguide temperature sensor based on loaded strip-shaped structure and preparation method thereof
  • Asymmetric MZI optical waveguide temperature sensor based on loaded strip-shaped structure and preparation method thereof
  • Asymmetric MZI optical waveguide temperature sensor based on loaded strip-shaped structure and preparation method thereof

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[0046] Cleaning treatment of silicon substrate: soak the silicon substrate in an acetone solution for ultrasonic cleaning for 8 minutes, then repeatedly wipe it with acetone and ethanol cotton balls, rinse with deionized water, blow dry with nitrogen, and finally at 100°C Bake for 1 hour to remove moisture.

[0047] The polymer waveguide lower cladding layer is prepared by the spin coating process: the polymer material PMMA is spin coated on the cleaned silicon wafer substrate, the spin coating speed is controlled at 4000 rpm, and then the film is baked at 120°C for 2 hours , The waveguide undercladding with a thickness of 6μm is obtained.

[0048] The waveguide groove is prepared by standard photolithography and dry etching processes: First, an Al mask with a thickness of 100nm is vapor-deposited on the prepared polymer undercladding layer, and the Al film is spin-coated by a spin coating process A layer of positive photoresist BP212 with a thickness of 2μm is pre-baked at 85°C f...

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Abstract

The invention, which belongs to the technical field of a planar optical waveguide sensor and preparation thereof, provides an asymmetric MZI optical waveguide temperature sensor based on a loaded strip-shaped structure and a preparation method thereof. The asymmetric MZI optical waveguide temperature sensor comprises an input straight waveguide, a 3-dB Y-branch beam splitter, two asymmetric reference arm and sensing arm, a 3-dB Y-branch coupler and an output straight waveguide. The reference arm and the sensing arm include silicon substrates, lower polymer claddings with double-waveguide groove structures, reference arm optical waveguide core layers and sensing arm optical waveguide core layers, and unexposed and exposed organic-inorganic hybrid material flat plates, and upper polymer claddings that are arranged successively from bottom to top. According to the invention, with the organic-inorganic hybrid materials containing the chromophore molecules on the surface of the photo-bleaching sensor arm, the refractive index changes, the difference of the optical mode field with the environment change in light transmission of two interference arms is increased further, and the output light intensity change is increased. Therefore, the sensor has an important practical application value.

Description

technical field [0001] The invention belongs to the technical field of planar optical waveguide sensors and their preparation, and specifically relates to a waveguide core layer with a silicon chip as a substrate, an organic-inorganic hybrid material as a loaded strip waveguide, and an organic polymer with a large thermo-optic coefficient. and cladding asymmetric Mach–Zehnder interferometer (MZI) optical waveguide temperature sensor and its preparation method. Background technique [0002] Temperature is closely related to the environment in which human beings live. People's daily life, agricultural product planting, animal reproduction, scientific research and many other fields are all closely related to temperature measurement. Therefore, the precise measurement of temperature has been an important research direction for a long time. With the development of science and technology, the monitoring of temperature is developing in the direction of high precision, large resolu...

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Application Information

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IPC IPC(8): G01K11/32
CPCG01K11/32
Inventor 张大明牛东海王希斌许强姜明慧王力磊
Owner JILIN UNIV
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