Thermally insensitive planar optical waveguide and method of making the same
A planar optical waveguide, sensitive technology, applied in optical waveguides, light guides, optics, etc., can solve the problems of large optical transmission loss and easy interference, and achieve the effects of short manufacturing cycle, simple process and good optical properties
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[0050] As a preferred embodiment, the material of the base layer includes silicon dioxide, and the material of the core layer includes silicon dioxide doped with germanium ions.
[0051] In this embodiment, by setting the material of the base layer and the core layer to be silicon dioxide, since silicon dioxide is currently the mainstream planar optical waveguide material, it is beneficial to realize seamless connection with the mainstream planar optical waveguide without additional investment in research and development. Reduce R&D costs.
[0052] As a preferred implementation manner, the cross-sectional structure of the planar optical waveguide is a buried strip-shaped single-mode waveguide structure. Select H1=W1=6um, H2=10um, the refractive index of the upper cladding layer is 1.45, the refractive index of the core layer is 1.46, and the refractive index of the base layer is 1.44. The cross-sectional structure of the optical waveguide is designed by using Optiwave BPM soft...
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