Inorganic thin film, preparation method and application thereof, thin film packaging structure and display panel

Abstract

The invention provides a preparation method and application of an inorganic thin film. The preparation method of the inorganic thin film comprises the following steps of adopting PEVCD for depositingto form a first rough surface film through the radio-frequency power being 2600W to 3400W; and adopting PEVCD for depositing on the first rough surface film to form a compact main film through the radio-frequency power being 1800W to 2200W. The invention further provides a thin film packaging structure and a display panel. The thin film packaging structure comprises at least two inorganic thin films arranged in a stacking way, and an organic thin film arranged between each two adjacent inorganic thin films, wherein at least one surface of each organic thin film makes contact with the rough surface of the corresponding inorganic thin film, so that the occurrence of the phenomenon of stripping in the bending process can be effectively reduced, and each inorganic thin film is provided with acompact main film so as to be capable of effectively resisting water oxygen and good in packaging effect.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an inorganic thin film and its preparation method, application, thin film packaging structure and display panel. Background technique [0002] With the rapid development of information technology, portable devices that can obtain information and information anytime and anywhere are becoming popular, which drives the rapid development of organic electronic devices such as organic light emitting diodes (OLEDs). [0003] OLED devices have self-illumination, low power consumption, high response speed, wide viewing angle, high resolution, wide temperature range, high brightness, high contrast, high luminous efficiency, low operating voltage, high shock resistance, light, thin, flexible, etc. With a series of advantages, it has been widely concerned in the field of lighting and display. [0004] However, the electrodes of OLED devices are usually active metals, which are easily oxidi...

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Problems solved by technology

[0006] However, in thin-film packaging prepared by organic / inorganic thin-film stacking, the interface connection between the organic thin film and the inorganic thin film is relatively fragile, and peeling may occur under bending conditions, which in turn affects the effect of blocking water and oxygen.

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